The 28 nanometer (28 nm) lithography process is a half-node semiconductor manufacturing process used as a stopgap between the 32 nm and 22 nm processes. Commercial integrated circuit manufacturing using 28 nm process began in 2011. This technology superseded by commercial 22 nm process.

Industry

Process Name
1st Production
Lithography	Lithography
	Immersion
	Exposure
Wafer	Type
	Size
Transistor	Type
	Voltage
Metal Layers
Gate Length (Lg)
Contacted Gate Pitch (CPP)
Minimum Metal Pitch (MMP)
SRAM bitcell	High-Perf (HP)
	High-Density (HD)
	Low-Voltage (LV)
DRAM bitcell	eDRAM

TSMC		Common Platform Alliance The Common Platform Alliance is a joint collaboration between IBM, Samsung, GlobalFoundries, Toshiba, NEC, STMicroelectronics, Infineon Technologies, Chartered Semiconductor Manufacturing, Renasas		UMC
28LP, 28HPL, 28HP		28LP, 28LPP, 28SLP		28HPC, 28HLP, 28HPC+, 28µLP
4Q 2011		2014		2013
193 nm		193 nm		193 nm
Yes		Yes		Yes
DP		DP		DP
Bulk		Bulk		Bulk
300 mm		300 mm		300 mm
Planar		Planar		Planar
1 V, 0.8 V		1 V, 0.85 V		0.9 V, 1.05 V, 0.7 V
10		10		10
Value	32 nm Δ	Value	32 nm Δ	Value	40 nm Δ
24 nm		28 nm		33 nm
117 nm		113.4 nm		120 nm
90 nm		90 nm		90 nm
		0.152 µm²
0.127 µm²		0.120 µm²		0.124 µm²
0.155 µm²		0.197 µm²

28 nm Microprocessors

• AMD
  • A8
  • A10
• HiSilicon
  • Kirin
• Intel (Fab'ed by TSMC)
  • Atom x3
• MediaTek
  • Helio
• Phytium
  • FT-1500A
• PEZY
  • PEZY-SC
  • PEZY-SCnp
• Renesas
  • R-Car
• Xiaomi
  • Surge

This list is incomplete; you can help by expanding it.

28 nm Microarchitectures

• AMD
  • Steamroller
  • Excavator
• ARM Holdings
  • Cortex-A53
• Intel/Nervana
  • Lake Crest
• Phytium
  • Xiaomi
• VIA Technologies
  • Isaiah II
• Zhaoxin
  • ZhangJiang
  • WuDaoKou

This list is incomplete; you can help by expanding it.

References

• Samsung foundry solution for 32 & 28 nm
• Wu, Shien-Yang, et al. "A highly manufacturable 28nm cmos low power platform technology with fully functional 64mb sram using dual/tripe gate oxide process." VLSI Technology, 2009 Symposium on. IEEE, 2009.
• Shang, Huiling, et al. "High performance bulk planar 20nm CMOS technology for low power mobile applications." VLSI Technology (VLSIT), 2012 Symposium on. IEEE, 2012.
• Arnaud, F., et al. "Competitive and cost effective high-k based 28nm CMOS technology for low power applications." Electron Devices Meeting (IEDM), 2009 IEEE International. IEEE, 2009.
• Yuan, J., et al. "Performance elements for 28nm gate length bulk devices with gate first high-k metal gate." Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on. IEEE, 2010.
• Liang, C. W., et al. "A 28nm poly/SiON CMOS technology for low-power SoC applications." VLSI Technology (VLSIT), 2011 Symposium on. IEEE, 2011.
• James, Dick. "High-k/metal gates in the 2010s." Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI. IEEE, 2014.