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8 µm lithography process

The 8 µm lithography process (8-micron) was the semiconductor process technology used for early FET devices by leading semiconductor companies during the late early 1970s. This process had a smallest feature or gate length of roughly 8 µm between the source and drain (Poly-SI channel implant). The typical wafer size for this process at companies such as Fairchild and TI was 2-inch (51 mm). This process was later superseded by 6 µm, 5 µm, and 3 µm processes.


The 8-micron process was used by Intel for many of their memory chips in the early 1970s such as the 2104 which was released in 1972 and became the first truly widely used DRAM chip. Those chips used Si-gate nMOS transistors using a polysilicon word line and an aluminum metal bit line. Alternatively to that was Mostek's which created a 4 Kib chip using an aluminum metal word line and drain diffusion for the bit line[1].

Process Name
1st Production
Metal Layers
Gate Length (Lg)
Contacted Gate Pitch (CPP)
Minimum Metal Pitch (MMP)
SRAM bitcellHigh-Perf (HP)
High-Density (HD)
Low-Voltage (LV)
DRAM bitcelleDRAM
IntelTIFairchildMOS TechnologyMOSTEK
51 mm    
5 V5 V5 V5 V5 V
1, 2
Value10 µm ΔValue10 µm ΔValue10 µm ΔValueN/AValueN/A
8 µm0.80x8 µm0.80x8 µm0.80x8 µm8 µm
1280 µm²       

8 µm Microprocessors[edit]

This list is incomplete; you can help by expanding it.

8 µm Chips[edit]

  • Intel
    • 1103, 1 Kib DRAM, world's first commercial DRAM
    • 2104, 4 Kib DRAM, world first widely used & mass produced (especially in the PC)


  1. Rideout, V. Leo. "One-device cells for dynamic random-access memories: A tutorial." IEEE Transactions on Electron Devices 26.6 (1979): 839-852.
  • Dr. Neil Berglund, Intel Corporation; The evolution of MOS process technology.
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