The 350 nanometer lithography process (350 nm or 0.35 µm) is a full node semiconductor manufacturing process following the 500 nm process node. Commercial integrated circuit manufacturing using 350 nm process began in late 1995. 350 nm was phased out and replaced by 250 nm in 1999.

Industry

Fab
Process Name​
1st Production​
Voltage​
Metal Layers​
​
Gate Oxide​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell

Intel		IBM		AMD		AMD		DEC		Fujitsu		IDT		NEC		TI		Motorola		Hitachi
P854				CS-34		CS-34EX		CMOS-6		CS-60								HiPerMOS 2
1994		1994		1995				1995		1996		1996		1995		1997		1996
3.3 V
4		5		5		5		4		5		3		4		5
Value	500 nm Δ	Value	500 nm Δ	Value	500 nm Δ	Value	500 nm Δ	Value	500 nm Δ	Value	500 nm Δ	Value	500 nm Δ	Value	500 nm Δ	Value	500 nm Δ	Value	500 nm Δ	Value	500 nm Δ
								6.5 nm
550 nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x
880 nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x
18.1 µm²	0.41x	? µm²	?x	? µm²	?x	? µm²	?x	? µm²	?x	? µm²	?x	? µm²	?x	? µm²	?x	? µm²	?x	21.67 µm²	?x	? µm²	?x

Intel

Intel 0.350 micron Design Rules
Layer	Pitch	Thick
Isolation	? nm	? nm
Polysilicon	? nm	? nm
Metal 1	880 nm	600 nm
Metal 2	1.16 µm	800 nm
Metal 3	1.16 µm	800 nm
Metal 4	1.70 µm	1.70 µm

DEC

DEC's 0.35 µm process, called CMOS-6, was designed at Fab-6 in Hudson, Mass. The process uses a Cobalt-Disilicide Salicide with L_drawn of 0.35 µm with an L_eff of 0.25 µm with a T_ox of 6 nm. CMOS-6 was used for a number of DEC's processors such as Alpha and StrongARM. The plant was later sold to Intel where it continued to manufacture Intel's line of XScale processors.

350 nm Microprocessors

• Intel
  • Pentium
  • Pentium MMX
  • Pentium OverDrive MMX
  • Pentium II
  • Mobile Pentium II
• AMD
  • Am5x86
  • Enhanced Am486
  • K5
  • K6
• DEC
  • Alpha 21164A
  • Alpha 21264
  • StrongARM
• HAL
  • SPARC64 II
• Fujitsu
  • TurboSPARC
• IBM
  • PowerPC 603ev
  • PowerPC 604
  • PowerPC 604e
  • PowerPC RS64-II
• Cyrix
  • 6x86
• MIPS
  • R5000
  • R10000
  • R4400
• Sun
  • UltraSPARC II
  • UltraSPARC IIi
• NEC
  • VR4300
• Parallax
  • Propeller 1

This list is incomplete; you can help by expanding it.

350 nm Microcontrollers

• AMD
  • Am186Cx
  • Am186Ex

This list is incomplete; you can help by expanding it.

350 nm Microarchitectures

• AMD
  • K5
  • K6
• Intel
  • 80186 (embedded IP cores only)
• DEC
  • Alpha 21264
  • StrongARM

This list is incomplete; you can help by expanding it.

References

• Schutz, J., and R. Wallace. "A 450 MHz IA32 P6 family microprocessor." Solid-State Circuits Conference, 1998. Digest of Technical Papers. 1998 IEEE International. IEEE, 1998.
• von Kaenel, Vincent, et al. "A 320 MHz, 1.5 mW@ 1.35 V CMOS PLL for microprocessor clock generation." IEEE Journal of Solid-State Circuits 31.11 (1996): 1715-1722.