Semiconductor & Computer Engineering
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Difference between revisions of "45 nm lithography process"
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| − | | | + | File:45nm SRAM photo.JPG|Die photo of an [[Intel]] [[45 nm]] shuttle test chip including 153 MiB [[SRAM]] and logic test circuits |
| − | + | File:45nm wafer photo 1.jpg|300 mm wafer with 45 nm shuttle test chips | |
| − | | | + | File:45nm wafer photo 2.JPG|Intel engineer holding 300 mm wafer with 45 nm shuttle test chips |
| + | File:45nm-wafer-photo-3.jpg|Intel 300 mm wafer with 45 nm shuttle test chips | ||
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Revision as of 09:16, 9 February 2017
Semiconductor lithography processes technology
The 45 nanometer (45 nm) lithography process is a full node semiconductor manufacturing process following the 55 nm process stopgap. Commercial integrated circuit manufacturing using 45 nm process began in 2007. This technology was superseded by the 40 nm process (HN) / 32 nm process (FN) in 2010.
Industry
| Fab |
|---|
| Process Name |
| 1st Production |
| Type |
| Wafer |
| |
| Contacted Gate Pitch |
| Interconnect Pitch (M1P) |
| SRAM bit cell (HD) |
| SRAM bit cell (LP) |
| DRAM bit cell |
| Intel | Fujitsu | TI | Toshiba / Sony / NEC | IBM / Toshiba / Sony / AMD | |||||
|---|---|---|---|---|---|---|---|---|---|
| P1266 | CS-300 | ||||||||
| 2007 | 2008 | 2008 | 2006 | 2007 | |||||
| Bulk | PDSOI | ||||||||
| 300mm | |||||||||
| Value | 65 nm Δ | Value | 65 nm Δ | Value | 65 nm Δ | Value | 65 nm Δ | Value | 65 nm Δ |
| 180 nm | 0.82x | 190 nm | ?x | ? nm | ?x | 180 nm | ?x | 190 nm | 0.76x |
| 160 nm | 0.76x | ? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x |
| 0.346 µm² | 0.61x | 0.225 µm² | ?x | 0.255 µm² | ?x | 0.248 µm² | ?x | 0.370 µm² | 0.57x |
| 0.382 µm² | 0.56x | ||||||||
| 0.067 µm² | 0.53x | ||||||||
Intel
6T SRAM Bit-Cell
300 mm wafer with 45 nm shuttle test chips
Intel engineer holding 300 mm wafer with 45 nm shuttle test chips
Intel 300 mm wafer with 45 nm shuttle test chips
| Intel 45nm Design Rules | |||
|---|---|---|---|
| Layer | Pitch | Thick | Aspect Ratio |
| Isolation | 200 nm | 200 nm | - |
| Contacted Gate | 180 nm | 60 nm | -- |
| Metal 1 | 160 nm | 144 nm | 1.8 |
| Metal 2 | 160 nm | 144 nm | 1.8 |
| Metal 3 | 160 nm | 144 nm | 1.8 |
| Metal 4 | 240 nm | 216 nm | 1.8 |
| Metal 5 | 280 nm | 252 nm | 1.8 |
| Metal 6 | 360 nm | 324 nm | 1.8 |
| Metal 7 | 560 nm | 504 nm | 1.7 |
| Metal 8 | 810 nm | 720 nm | 1.8 |
| Metal 9 | 30.5 µm | 7 µm | 0.4 |
45 nm Microprocessors
- AMD
- IBM
- Intel
This list is incomplete; you can help by expanding it.n Chips== This list is incomplete; you can help by expanding it.
45 nm Microarchitectures
This list is incomplete; you can help by expanding it.