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Difference between revisions of "10 nm lithography process"

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{{lithography processes}}
 
{{lithography processes}}
 
The '''10 nm lithography process''' is a [[technology node|full node]] semiconductor manufacturing process following the [[14 nm lithography process|14 nm process]] stopgap. Commercial [[integrated circuit]] manufacturing using 10 nm process is set to begin in 2017. This technology is set to be replaced by [[7 nm lithography process|7 nm process]] 2019.
 
The '''10 nm lithography process''' is a [[technology node|full node]] semiconductor manufacturing process following the [[14 nm lithography process|14 nm process]] stopgap. Commercial [[integrated circuit]] manufacturing using 10 nm process is set to begin in 2017. This technology is set to be replaced by [[7 nm lithography process|7 nm process]] 2019.
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== Industry ==
 +
 +
=== Intel ===
 +
{| class="wikitable"
 +
|-
 +
| || Measurement || Scaling from [[14 nm]]
 +
|-
 +
| Fin Pitch || ? nm || ?x
 +
|-
 +
| Contacted Gate Pitch || 55 nm || 0.78x
 +
|-
 +
| Interconnect Pitch (M1P) || 38 nm || 0.74x
 +
|-
 +
| [[SRAM]] bit cell || ? µm<sup>2</sup> || ?x
 +
|}
 +
 +
=== Global Foundries / Samsung ===
 +
{| class="wikitable"
 +
|-
 +
| || Measurement || Scaling from [[14 nm]] || Notes
 +
|-
 +
| Fin Pitch || ? nm || ?x ||
 +
|-
 +
| Contacted Gate Pitch || 64 nm || 0.82x ||
 +
|-
 +
| Interconnect Pitch (M1P) || 48 nm || 0.75x ||
 +
|-
 +
| [[SRAM]] bit cell || 0.049 µm<sup>2</sup> || 0.61x || High Performance
 +
|-
 +
| [[SRAM]] bit cell || 0.04 µm<sup>2</sup> || 0.63x || High Density
 +
|}
 +
 +
=== TSMC  ===
 +
{| class="wikitable"
 +
|-
 +
| || Measurement || Scaling from [[16 nm]]
 +
|-
 +
| Fin Pitch || ? nm || ?x
 +
|-
 +
| Contacted Gate Pitch || 70 nm || 0.78x
 +
|-
 +
| Interconnect Pitch (M1P) || 46 nm || 0.72x
 +
|-
 +
| [[SRAM]] bit cell || ? µm<sup>2</sup> || ?x
 +
|}
  
 
== 10 nm Microprocessors==
 
== 10 nm Microprocessors==

Revision as of 22:14, 23 April 2016

The 10 nm lithography process is a full node semiconductor manufacturing process following the 14 nm process stopgap. Commercial integrated circuit manufacturing using 10 nm process is set to begin in 2017. This technology is set to be replaced by 7 nm process 2019.

Industry

Intel

Measurement Scaling from 14 nm
Fin Pitch  ? nm  ?x
Contacted Gate Pitch 55 nm 0.78x
Interconnect Pitch (M1P) 38 nm 0.74x
SRAM bit cell  ? µm2  ?x

Global Foundries / Samsung

Measurement Scaling from 14 nm Notes
Fin Pitch  ? nm  ?x
Contacted Gate Pitch 64 nm 0.82x
Interconnect Pitch (M1P) 48 nm 0.75x
SRAM bit cell 0.049 µm2 0.61x High Performance
SRAM bit cell 0.04 µm2 0.63x High Density

TSMC

Measurement Scaling from 16 nm
Fin Pitch  ? nm  ?x
Contacted Gate Pitch 70 nm 0.78x
Interconnect Pitch (M1P) 46 nm 0.72x
SRAM bit cell  ? µm2  ?x

10 nm Microprocessors

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10 nm System on Chips

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10 nm Microarchitectures

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