The 500 nanometer (500 nm) lithography process is a full node semiconductor manufacturing process following the 600 nm process. Commercial integrated circuit manufacturing using 500 nm process began in 1992. 500 nm and was phased out and later replaced by 350 nm in 1995.

Industry

Fab
Process Name​
1st Production​
Metal Layers​
​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell

Intel		AMD		DEC		Fujitsu		Hitachi		HP		IBM		TI		Motorola		National (BiCMOS)
P852		CS-24		CMOS-5						CMOS14C		CMOS-5X				HiPerMOS 1		ABiC V
1994		1993		1993		1994		1994		1996		1994		1995		1995
		3		4		3		4		5		4		4
Value	800 nm Δ	Value	800 nm Δ	Value	800 nm Δ	Value	800 nm Δ	Value	800 nm Δ	Value	800 nm Δ	Value	800 nm Δ	Value	800 nm Δ	Value	800 nm Δ	Value	800 nm Δ
? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x
? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x	? nm	?x
44 µm2	0.40x	? µm2	?x	? µm2	?x	? µm2	?x	? µm2	?x	? µm2	?x	? µm2	?x	? µm2	?x	? µm2	?x	? µm2	?x

500 nm Microprocessors

• AMD
  • Am486
  • K5 ("SSA/5" models only)
• Cyrix
  • 6x86
• DEC
  • Alpha 21164
  • Alpha 21064A
  • Alpha 21164PC
• Exponential
  • X704
• Fujitsu
  • microSPARC II ("Swift")
• Hitachi
  • harp-1
• HP
  • PA-7200 ("Thunderbird")
  • PA-7300LC
  • PA-8000 ("Onyx", "Vulcan")
• IBM
  • PowerPC 601v
  • PowerPC 602
  • PowerPC 603
  • PowerPC 603e
• Intel
  • Pentium Pro
• NexGen
  • Nx586
• Qualcomm
  • MSM2
• Ross
  • hyperSPARC ("Colorado 2")
• Sun
  • microSPARC II, 1994
  • UltraSPARC

This list is incomplete; you can help by expanding it.

500 nm Microarchitectures

• AMD
  • K5
• Intel
  • 80186 (embedded IP cores only)

This list is incomplete; you can help by expanding it.