The 28 nm lithography process is a half-node semiconductor manufacturing process used as a stopgap between the 32 nm and 22 nm processes. Commercial integrated circuit manufacturing using 28 nm process began in 2011. This technology superseded by commercial 22 nm process.

Industry

Samsung

	Measurement	Scaling from 40 nm
Contacted Gate Pitch	90 nm	0.70x
Interconnect Pitch (M1P)	96 nm	0.82x
SRAM bit cell	0.120 µm2	?x

TSMC

	Measurement	Notes
Contacted Gate Pitch	117 nm
Interconnect Pitch (M1P)	? nm
SRAM bit cell	0.127 µm2	High Density
SRAM bit cell	0.155 µm2	Low Voltage

28 nm Microprocessors

• AMD
  • A8
  • A10

This list is incomplete; you can help by expanding it.

28 nm System on Chips

• Intel
  • Atom x3

This list is incomplete; you can help by expanding it.