Latest revision as of 21:44, 4 April 2022

Semiconductor lithography processes technology

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The 350 nanometer lithography process (350 nm or 0.35 µm) is a full node semiconductor manufacturing process following the 500 nm process node. Commercial integrated circuit manufacturing using 350 nm process began in late 1995. 350 nm was phased out and replaced by 250 nm in 1999.

Industry[edit]

Intel[edit]

DEC[edit]

DEC's 0.35 µm process, called CMOS-6, was designed at Fab-6 in Hudson, Mass. The process uses a Cobalt-Disilicide Salicide with L_drawn of 0.35 µm with an L_eff of 0.25 µm with a T_ox of 6 nm. CMOS-6 was used for a number of DEC's processors such as Alpha and StrongARM. The plant was later sold to Intel where it continued to manufacture Intel's line of XScale processors.

350 nm Microprocessors[edit]

• Intel
  • Pentium
  • Pentium MMX
  • Pentium OverDrive MMX
  • Pentium II
  • Mobile Pentium II
• AMD
  • Am5x86
  • Enhanced Am486
  • K5
  • K6
• DEC
  • Alpha 21164A
  • Alpha 21264
  • StrongARM
• HAL
  • SPARC64 II
• Fujitsu
  • TurboSPARC
• IBM
  • PowerPC 603ev
  • PowerPC 604
  • PowerPC 604e
  • PowerPC RS64-II
• Cyrix
  • 6x86
• MIPS
  • R5000
  • R10000
  • R4400
• Sun
  • UltraSPARC II
  • UltraSPARC IIi
• NEC
  • VR4300
• Parallax
  • Propeller 1

This list is incomplete; you can help by expanding it.

350 nm Microcontrollers[edit]

• AMD
  • Am186Cx
  • Am186Ex

This list is incomplete; you can help by expanding it.

350 nm Microarchitectures[edit]

• AMD
  • K5
  • K6
• Intel
  • 80186 (embedded IP cores only)
• DEC
  • Alpha 21264
  • StrongARM

This list is incomplete; you can help by expanding it.

350 nm Mikron[edit]

• МЦСТ ^[2]
  • МЦСТ-R150

References[edit]

• Schutz, J., and R. Wallace. "A 450 MHz IA32 P6 family microprocessor." Solid-State Circuits Conference, 1998. Digest of Technical Papers. 1998 IEEE International. IEEE, 1998.
• von Kaenel, Vincent, et al. "A 320 MHz, 1.5 mW@ 1.35 V CMOS PLL for microprocessor clock generation." IEEE Journal of Solid-State Circuits 31.11 (1996): 1715-1722.