The 5 nanometer (5 nm or 50 Å) lithography process is a technology node semiconductor manufacturing process following the 7 nm process node. Commercial integrated circuit manufacturing using 7 nm process is set to begin sometimes around 2020.

The term "5 nm" is simply a commercial name for a generation of a certain size and its technology, and does not represent any geometry of the transistor.

Industry

Preliminary Data! Information presented in this article deal with future products, data, features, and specifications that have yet to be finalized, announced, or released. Information may be incomplete and can change by final release.

Process Name
1st Production
Lithography	Lithography
	Immersion
	Exposure
Wafer	Type
	Size
Transistor	Type
	Voltage
Fin	Pitch
	Width
	Height
Gate Length (Lg)
Contacted Gate Pitch (CPP)
Minimum Metal Pitch (MMP)
SRAM bitcell	High-Perf (HP)
	High-Density (HD)
	Low-Voltage (LV)
DRAM bitcell	eDRAM

Intel		TSMC		GlobalFoundries		Samsung		Common Platform IBM, Samsung, GlobalFoundries Paper
P1278? (CPU), P1279? (SoC)
		193 nm		EUV		EUV		EUV
		Yes				Yes
		LELELELE		SE		SE		SE
Bulk		Bulk		Bulk		Bulk		Bulk
300 nm		300 nm		300 nm		300 nm		300 nm
		FinFET				FinFET		GAA
Value	7 nm Δ	Value	7 nm Δ	Value	7 nm Δ	Value	7 nm Δ	Value	7 nm Δ
								N/A
								12 nm
		~44 nm	0.81x					48 nm	1.00x
		~32 nm	0.84x

Intel

In May of 2017, Intel's Technology and Manufacturing Group Director, Mark Bohr, confirmed that Intel was already started researching their 5 nm node as their 7nm was already in development phase.

Common Platform Alliance Paper

In a joint paper by the Common Platform (IBM, GlobalFoundries, Samsung) a 5nm node was proposed at the 2017 VLSI Symposium. The paper presents a new horizontally stacked nanowires gate-all-around (GAA) FET with good properties which can be a good candidate for the replacement of FinFET at the 5nm node. The paper reports transistors with an aggressive L_g of 12 nm and a contacted poly pitch of 48 nm.

5 nm Microprocessors

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5 nm Microarchitectures

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References

• TSMC, Estimated at TSMC Technology Symposium, San Jose, March 15, 2017