Semiconductor & Computer Engineering
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Revision as of 17:51, 5 September 2016
Semiconductor lithography processes technology
The 14 nanometer (14 nm) lithography process is a half-node semiconductor manufacturing process used as a stopgap between the 16 nm and 10 nm processes. The term "14 nm" is simply a commercial name for a generation of a certain size and its technology, as opposed to gate length or half pitch. Commercial integrated circuit manufacturing using 14 nm process began in 2014. This technology is set to be replaced with 10 nm process in 2017.
Contents
Industry
14 nm became Intel's 2nd generation finFET transistors. This process became Samsungs' and GlobalFoundries first generation of finFet-based transistors. Intel uses TiN pMOS / TiAlN nMOS while Samsung uses TiN pMOS / TiAIC nMOS as work function metals.
| Fab |
|---|
| Process Name |
| 1st Production |
| Type |
| Wafer |
| |
| Fin Pitch |
| Fin Width |
| Fin Height |
| Contacted Gate Pitch |
| Interconnect Pitch (M1P) |
| SRAM bit cell (HP) |
| SRAM bit cell (HD) |
| DRAM bit cell |
| Intel | Samsung | GlobalFoundries | UMC | IBM | |||||
|---|---|---|---|---|---|---|---|---|---|
| P1272 | |||||||||
| 2014 | 2015 | 2015 | 2017 | 2015 | |||||
| Bulk FinFET | SOI FinFET | ||||||||
| 300mm | |||||||||
| Value | 22 nm Δ | Value | 20 nm Δ | Value | 20 nm Δ | Value | 28 nm Δ | Value | 22 nm Δ |
| 42 nm | 0.70x | 48 nm | N/A | 48 nm | N/A | ? nm | N/A | 42 nm | N/A |
| 8 nm | 1.00x | 8 nm | 8 nm | ? nm | 10 nm | ||||
| 42 nm | 1.24x | ~38 nm | ~38 nm | ? nm | 25 nm | ||||
| 70 nm | 0.78x | 78 nm | 1.22x | 78 nm | 1.22x | ? nm | ?x | 80 nm | 0.80x |
| 52 nm | 0.65x | 64 nm | 1.00x | 64 nm | 1.00x | ? nm | ?x | 64 nm | 0.80x |
| 0.0588 µm2 | 0.54x | 0.080 µm2 | ?x | 0.080 µm2 | ?x | ? µm2 | ?x | 0.900 µm2 | |
| 0.064 µm2 | ?x | 0.064 µm2 | ?x | ? µm2 | ?x | 0.081 µm2 | 0.81x | ||
| ? µm2 | ?x | 0.0174 µm2 | 0.67x | ||||||
Design Rules
| Intel 14nm Design Rules | ||
|---|---|---|
| Layer | Pitch | Scale Factor |
| Fin | 42 nm | 0.70 |
| Contacted Gate Pitch | 70 nm | 0.78 |
| Metal 0 | 56 | - |
| Metal 1 | 70 | 0.78 |
| Metal 2 | 52 | 0.65 |
Find models
Click to browse all 14 nm MPU models
14 nm Microprocessors
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14 nm System on Chips
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14 nm Microarchitectures
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Documents
- A 14nm logic technology featuring 2 nd-generation FinFET, air-gapped interconnects, self-aligned double patterning and a 0.0588 µm 2 SRAM cell size, 15-17 Dec. 2014; 10.1109/IEDM.2014.7046976