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Difference between revisions of "500 nm lithography process"
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Latest revision as of 05:15, 20 July 2018
The 500 nanometer (500 nm) lithography process is a full node semiconductor manufacturing process following the 600 nm process. Commercial integrated circuit manufacturing using 500 nm process began in 1992. 500 nm and was phased out and later replaced by 350 nm in 1995.
Industry[edit]
Fab |
---|
Process Name |
1st Production |
Metal Layers |
|
Contacted Gate Pitch |
Interconnect Pitch (M1P) |
SRAM bit cell |
Intel | AMD | DEC | Fujitsu | Hitachi | HP | IBM | TI | Motorola | National (BiCMOS) | ||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
P852 | CS-24 | CMOS-5 | CMOS14C | CMOS-5X | HiPerMOS 1 | ABiC V | |||||||||||||
1994 | 1993 | 1993 | 1994 | 1994 | 1996 | 1994 | 1995 | 1995 | |||||||||||
3 | 4 | 3 | 4 | 5 | 4 | 4 | |||||||||||||
Value | 800 nm Δ | Value | 800 nm Δ | Value | 800 nm Δ | Value | 800 nm Δ | Value | 800 nm Δ | Value | 800 nm Δ | Value | 800 nm Δ | Value | 800 nm Δ | Value | 800 nm Δ | Value | 800 nm Δ |
? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x |
? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x | ? nm | ?x |
44 µm² | 0.40x | ? µm² | ?x | ? µm² | ?x | ? µm² | ?x | ? µm² | ?x | ? µm² | ?x | ? µm² | ?x | ? µm² | ?x | ? µm² | ?x | ? µm² | ?x |
DEC[edit]
- See also: DEC's Process Technology History
DEC's half-micron process, CMOS-5, which was used for their microprocessors such as the Alpha 21164 used a Cabalt di-silicide in diffusion and poly with a channel length of 0.365 µm with a TOX of 9 nm along with 4 metal layers of AlCu (Aluminum Copper). The process had a Vtn/p = 0.5/-0.5 V and a supply voltage of 3.3 V.
DEC's Design Rules | ||
---|---|---|
Layer | Pitch | Thickness |
M1 | 1.50 µm | 0.84 µm |
M2 | 1.75 µm | 0.84 µm |
M3 | 5.00 µm | 1.53 µm |
M4 | 6.00 µm | 1.53 µm |
500 nm Microprocessors[edit]
- AMD
- Cyrix
- DEC
- Exponential
- Fujitsu
- microSPARC II ("Swift")
- Hitachi
- HP
- IBM
- Intel
- NexGen
- Qualcomm
- Ross
- hyperSPARC ("Colorado 2")
- Sun
- microSPARC II, 1994
- UltraSPARC
This list is incomplete; you can help by expanding it.
500 nm Microarchitectures[edit]
- AMD
- DEC
- Intel
This list is incomplete; you can help by expanding it.