Semiconductor & Computer Engineering
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Difference between revisions of "65 nm lithography process"
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Revision as of 00:57, 6 November 2017
Semiconductor lithography processes technology
The 65 nanometer (65 nm) lithography process is a full node semiconductor manufacturing process following the 80 nm process stopgap. Commercial integrated circuit manufacturing using 65 nm process began in 2005. This technology was superseded by the 55 nm process (HN) / 45 nm process (FN) in 2007.
Industry
| Fab |
|---|
| Process Name |
| 1st Production |
| Wafer |
| Metal Layers |
| |
| Contacted Gate Pitch |
| Interconnect Pitch (M1P) |
| SRAM bit cell (HD) |
| SRAM bit cell (LP) |
| DRAM bit cell |
| Intel | IBM / Toshiba / Sony / AMD | TI | IBM / Chartered / Infineon / Samsung | TSMC | Fujitsu | ||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| P1264 | CS-200/CS-201/CS-250 | ||||||||||
| 2005 | 2005 | 2007 | 2005 | 2005 | 2006 | ||||||
| 300mm | |||||||||||
| 8 | 10 | 11 | 10 | 11 | |||||||
| Value | 90 nm Δ | Value | 90 nm Δ | Value | 90 nm Δ | Value | 90 nm Δ | Value | 90 nm Δ | Value | 90 nm Δ |
| 220 nm | 0.85x | 250 nm | ?x | ? nm | ?x | 200 nm | 0.82x | 160 nm | 0.67x | ? nm | ?x |
| 210 nm | 0.95x | ? nm | ?x | ? nm | ?x | 180 nm | 0.73 | 180 nm | 0.75x | ? nm | ?x |
| 0.570 µm² | 0.57x | 0.540 µm² | 0.49 µm² | 0.540 µm² | 0.55x | 0.499 µm² | 0.50x | ||||
| 0.680 µm² | 0.65 µm² | 0.65x | 0.49 µm² | 0.676 µm² | 0.54x | 0.525 µm² | 0.53x | ? µm² | ?x | ||
| 0.127 µm² | 0.67x | 0.189 µm² | 0.69x | ||||||||
Design Rules
| Intel 65nm Design Rules | |||
|---|---|---|---|
| Layer | Pitch | Thick | Aspect Ratio |
| Isolation | 220 nm | 320 nm | - |
| Polysilicon | 220 nm | 90 nm | - |
| Contacted Gate | 220 nm | - | |
| Metal 1 | 210 nm | 170 nm | 1.6 |
| Metal 2 | 210 nm | 190 nm | 1.8 |
| Metal 3 | 220 nm | 200 nm | 1.8 |
| Metal 4 | 280 nm | 250 nm | 1.8 |
| Metal 5 | 330 nm | 300 nm | 1.8 |
| Metal 6 | 480 nm | 430 nm | 1.8 |
| Metal 7 | 720 nm | 650 nm | 1.8 |
| Metal 8 | 1.80 µm | 975 nm | 1.8 |
65 nm Microprocessors
- AMD
- Fujitsu
- IBM
- Intel
- Loongson
- Qualcomm
- Sun
This list is incomplete; you can help by expanding it.
65 nm Microarchitectures
This list is incomplete; you can help by expanding it.