From WikiChip
Difference between revisions of "5 nm lithography process"
Line 6: | Line 6: | ||
== Industry == | == Industry == | ||
− | {{ | + | |
+ | {{future information}} | ||
+ | |||
+ | |||
+ | {{scrolling table/top|style=text-align: right; | first=Fab | ||
+ | |Process Name | ||
+ | |1st Production | ||
+ | |Transistor | ||
+ | | | ||
+ | |Fin Pitch | ||
+ | |Fin Width | ||
+ | |Fin Height | ||
+ | |Contacted Gate Pitch | ||
+ | |Interconnect Pitch (M1P) | ||
+ | |SRAM bit cell (HP) | ||
+ | |SRAM bit cell (HD) | ||
+ | }} | ||
+ | {{scrolling table/mid}} | ||
+ | |- | ||
+ | ! colspan="2" | [[Intel]] !! colspan="2" | Common Platform<info>[[IBM]], [[Samsung]], [[GlobalFoundries]]</info> !! colspan="2" | [[TSMC]] | ||
+ | |- style="text-align: center;" | ||
+ | | colspan="2" | P1278? || colspan="2" | || colspan="2" | | ||
+ | |- style="text-align: center;" | ||
+ | | colspan="2" | || colspan="2" | || colspan="2" | | ||
+ | |- style="text-align: center;" | ||
+ | | colspan="6" | FinFET | ||
+ | |- | ||
+ | ! Value !! [[7 nm]] Δ !! Value !! [[7 nm]] Δ !! Value !! [[7 nm]] Δ | ||
+ | |- | ||
+ | | ? nm || ?x || ? nm || ?x || ? nm || ?x | ||
+ | |- | ||
+ | | ? nm || ?x || ? nm || ?x || ? nm || ?x | ||
+ | |- | ||
+ | | ? nm || ?x || ? nm || ?x || ? nm || ?x | ||
+ | |- | ||
+ | | ? nm || ?x || ? nm|| ?x || ~44 nm || 0.81x | ||
+ | |- | ||
+ | | ? nm || ?x || ? nm || ?x || ~32 nm || 0.84x | ||
+ | |- | ||
+ | | ? µm² || ?x || ? µm² || ?x || ? µm² || ?x | ||
+ | |- | ||
+ | | ? µm² || ?x || ? µm² || ?x || ? µm² || ?x | ||
+ | {{scrolling table/end}} | ||
== 5 nm Microprocessors== | == 5 nm Microprocessors== | ||
Line 14: | Line 56: | ||
{{expand list}} | {{expand list}} | ||
+ | == References == | ||
+ | * TSMC, Estimated at TSMC Technology Symposium, San Jose, March 15, 2017 | ||
[[Category:Lithography]] | [[Category:Lithography]] |
Revision as of 21:02, 15 March 2017
The 5 nanometer (5 nm) lithography process is a full node semiconductor manufacturing process following the 7 nm process node. Commercial integrated circuit manufacturing using 7 nm process is set to begin sometimes around 2021 or 2022. The term "5 nm" is simply a commercial name for a generation of a certain size and its technology, as opposed to gate length or half pitch.
Contents
Initial research
- At the 2016 IEEE International Electron Devices Meeting (IEDM), researchers from CEA-Leti presented a paper detailing the architecture for a possible 5 nm node. The researchers presented their functional vertically stacked gate-all-around (GAA) silicon NW/NS (NanoWire/NanoSheet) MOSFETs. GAA NW transistors are a highly promising candidate to succeed FinFETs as the drive current can be optimized by vertically stacking multiple horizontal nanowires.
Industry
Fab |
---|
Process Name |
1st Production |
Transistor |
|
Fin Pitch |
Fin Width |
Fin Height |
Contacted Gate Pitch |
Interconnect Pitch (M1P) |
SRAM bit cell (HP) |
SRAM bit cell (HD) |
Intel | Common Platform | TSMC | |||
---|---|---|---|---|---|
P1278? | |||||
FinFET | |||||
Value | 7 nm Δ | Value | 7 nm Δ | Value | 7 nm Δ |
? nm | ?x | ? nm | ?x | ? nm | ?x |
? nm | ?x | ? nm | ?x | ? nm | ?x |
? nm | ?x | ? nm | ?x | ? nm | ?x |
? nm | ?x | ? nm | ?x | ~44 nm | 0.81x |
? nm | ?x | ? nm | ?x | ~32 nm | 0.84x |
? µm² | ?x | ? µm² | ?x | ? µm² | ?x |
? µm² | ?x | ? µm² | ?x | ? µm² | ?x |
5 nm Microprocessors
This list is incomplete; you can help by expanding it.
5 nm Microarchitectures
This list is incomplete; you can help by expanding it.
References
- TSMC, Estimated at TSMC Technology Symposium, San Jose, March 15, 2017