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6 µm lithography process
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The 6μm lithography process was the semiconductor process technology used by some semiconductor companies during the early to mid 1970s. This process was later superseded by 5 µm, 3 µm, and 2 µm processes.


Process Name​
1st Production​
Contacted Gate Pitch​
Interconnect Pitch​
Metal Layers​
Intel Motorola AMI AMD
1971 1971
 ? nm  ? nm  ? nm  ? nm
 ? nm  ? nm  ? nm  ? nm
2 2
nMOS depletion-mode nMOS nMOS/pMOS/CMOS

6μm Microprocessors

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6μm Chips

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