The 2.5 μm lithography process was the semiconductor process technology used by some semiconductor companies during the late 1970s to early 1980s. This process was later superseded by 2 µm, 1.5 µm, and 1 µm processes.

Industry

Harris

Harris Corporation operated a 2.5 μm CMOS process, SAJI IV (Self-Aligned) .

2.5 μm microprocessors

• DEC
  • J11

2.5 μm microcontrollers

• Bell Labs BELLMAC-32 (BELLMAC-80)

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