The 800 nm lithography process was a semiconductor manufacturing process used by the leading integrated circuit manufacturers in early 1990s. This process was later replaced by 650 nm, 600 nm, and 500 nm processes.

Industry

Fab
Process Name​
1st Production​
Metal Layers​
​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell

Intel (BICMOS)	Intel (CHMOS V)	Intel (CMOS)		TI (CMOS)	TI (BiCMOS)	Cypress	AMD	Motorola	NEC	HP	HP	National (ASIC BiCMOS)	National (Memory BiCMOS)
		P650								CMOS26B	CMOS26G	ABiC IV	BiCMOS III
1991	1990	1989		1991	1991	1989	1991	1991	1991	1991		1990	1990
	2	3		2	2	2		3	2	3		4	2
Value	Value	Value	1 µm Δ	Value	Value	Value	Value	Value	Value	Value	Value	Value	Value
? nm	? nm	? nm	?x	? nm	? nm	? nm	? nm	? nm	? nm	? nm	? nm	? nm	? nm
? nm	? nm	? nm	?x	? nm	? nm	? nm	? nm	? nm	? nm	? nm	? nm	2.5 µm	1.8 µm
? µm2	? µm2	111 µm2	0.50x	? µm2	? µm2	? µm2	? µm2	? µm2	? µm2	? µm2	? µm2	100 µm2	? µm2

800 nm Microprocessors

• Intel
  • 80486, 1989
  • 80486 DX2
  • 80486 DX4
  • Pentium, 1992
• AMD
  • 80386
• Sun
  • microSPARC I, 1992
  • SuperSPARC II
• HP
  • PA-7100
• Motorola
  • 68030
  • 68040
• Cypress
  • CY7C601
• MIPS
  • R4000

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