The 150 nm lithography process is a half-node semiconductor manufacturing process used as a stopgap between the 180 nm and 130 nm processes. Commercial integrated circuit manufacturing using 55 nm process began in early 2000s. This technology superseded by commercial 130 nm process by 2001.

Industry

Fab
Process Name​
1st Production​
​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell

TSMC
2000
Value	180 nm Δ
? nm	?x
? nm	?x
3.42 µm2	0.74x

150 nm Microprocessors

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