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From WikiChip
5 nm lithography process
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The 5 nanometer (5 nm) lithography process is a full node semiconductor manufacturing process following the 7 nm process node. Commercial integrated circuit manufacturing using 7 nm process is set to begin sometimes around 2021 or 2022.
5 nm Microprocessors
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5 nm System on Chips
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5 nm Microarchitectures
This list is incomplete; you can help by expanding it.