The 6μm lithography process was the semiconductor process technology used by some semiconductor companies during the years of early to mid 1970s. This process was later superseded by 5 µm, 3 µm, and 2 µm processes.

Industry

Fab
Process Name​
1st Production​
Contacted Gate Pitch​
Interconnect Pitch​
Metal Layers​
Technology​
Wafer

Intel	Motorola
1971	1971
? nm	? nm
? nm	? nm
2	2
nMOS	depletion-mode nMOS
76 mm

Microprocessors

• Intel
  • 8080
• Motorola
  • 6800

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