The 40 nm lithography process is a half-node semiconductor manufacturing process used as a stopgap between the 45 nm and 32 nm processes. Commercial integrated circuit manufacturing using 40 nm process began in 2008 by leading semiconductor companies such as TSMC. This technology superseded by commercial 32 nm process by 2010.

Industry

Fab
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Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell

TSMC		Samsung		Toshiba / NEC		Crolles2 Alliance
Value	65 nm Δ	Value	65 nm Δ	Value	65 nm Δ	Value	65 nm Δ
162 nm	1.01x	129 nm	0.65x	168 nm	0.67x	140 nm	?x
? nm	?x	117 nm	0.65x	? nm	?x	? nm	?x
0.242 µm2	0.46x	? µm2	?x	0.195 µm2	0.33x	0.250 µm2	?x

40 nm Microprocessors

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40 nm System on Chips

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