The 600 nm lithography process was a semiconductor manufacturing process used by some integrated circuit manufacturers in early 1990s. This process was later replaced by 500 nm and 350 nm processes.

Industry

Fab
Process Name​
1st Production​
​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell

Intel (BiCMOS)	Intel (CMOS)	NEC	IBM	Motorola
			CMOS-4S
1994	1994	1992	1993	1994
Value	Value	Value	Value	Value
? nm	? nm	? nm	? nm	? nm
? nm	? nm	? nm	? nm	? nm
? µm2	? µm2	? µm2	? µm2	? µm2

600 nm Microprocessors

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600 nm Microarchitectures

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