The 1.5 µm lithography process was the semiconductor process technology used by the major semiconductor companies in the mid 1980s. By the late 80s this process was replaced by 1.3 µm, 1.2 µm, and 1 µm processes.

Industry

Intel's 1.5 µm (P646) was done wit 125 mm wafers. A second enhanced version in 1985 was increased to a 150 mm wafer size.

Fab
Process Name​
1st Production​
​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell

Intel (CHMOS III)	Intel
P646	P646
1982	1985
Value	Value
? nm	? nm
? nm	? nm
? µm2	? µm2

1.5 µm Microprocessors

• Intel
  • 80286
  • 80386 DX