From WikiChip
1.3 µm lithography process
(Redirected from 1.3 µm)

The 1.2 µm lithography process was the semiconductor process technology used by the major semiconductor companies between in the late 1980s. 1 µm was phased out in the early 1990s and was replaced by 1 µm, 800 nm, and 650 nm processes.

Industry[edit]

Fab
Process Name​
1st Production​
 ​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell
Motorola Hitachi Fujitsu
 
1987 1987
Value Value Value
 ? nm  ? nm  ? nm
 ? nm  ? nm  ? nm
 ? µm2  ? µm2  ? µm2

1.3 µm Microprocessors[edit]

This list is incomplete; you can help by expanding it.