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Difference between revisions of "1 µm lithography process"

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Revision as of 06:31, 27 April 2016

basic wafer drawing.svg Semiconductor lithography processes technology
v · d · e

The 1 µm lithography process was the semiconductor process technology used by the major semiconductor companies between in the late 1980s. 1 µm was phased out in the early 1990s and was replaced by 800 nm, 650 nm, and 600 nm processes.

Industry

Fab
Process Name​
1st Production​
 ​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell
Intel (CHMOS IV) HP National (BiCMOS)
P648 CMOS26 BiCMOS III
1987 1991 1988
Value Value Value
 ? nm  ? nm  ? nm
 ? nm  ? nm  ? nm
220 µm2  ? µm2  ? µm2

1 µm Microprocessors

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1 µm Microcontrollers

This list is incomplete; you can help by expanding it.

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