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Difference between revisions of "800 nm lithography process"
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− | ! [[Intel]] (BICMOS) !! [[Intel]] (CHMOS V) !! [[Intel]] (CMOS) !! [[TI]] (CMOS) !! [[TI]] (BiCMOS) !! [[Cypress]] !! [[AMD]] !! [[Motorola]] !! [[NEC]] !! [[HP]] !! [[HP]] | + | ! [[Intel]] (BICMOS) !! [[Intel]] (CHMOS V) !! colspan="2" | [[Intel]] (CMOS) !! [[TI]] (CMOS) !! [[TI]] (BiCMOS) !! [[Cypress]] !! [[AMD]] !! [[Motorola]] !! [[NEC]] !! [[HP]] !! [[HP]] |
|- style="text-align: center;" | |- style="text-align: center;" | ||
− | | || || P650 || || || || || || || CMOS26B || CMOS26G | + | | || || colspan="2" | P650 || || || || || || || CMOS26B || CMOS26G |
|- style="text-align: center;" | |- style="text-align: center;" | ||
− | | 1991 || 1990 || 1989 || 1991 || 1991 || 1989 || 1991 || 1991 || 1991 || 1991 || | + | | 1991 || 1990 || colspan="2" | 1989 || 1991 || 1991 || 1989 || 1991 || 1991 || 1991 || 1991 || |
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− | ! Value !! Value !! Value !! Value !! Value !! Value !! Value !! Value !! Value !! Value !! Value | + | ! Value !! Value !! Value !! [[1 µm]] Δ !! Value !! Value !! Value !! Value !! Value !! Value !! Value !! Value |
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− | | ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm | + | | ? nm || ? nm || ? nm || ?x || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm |
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− | | ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm | + | | ? nm || ? nm || ? nm || ?x || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm || ? nm |
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− | | ? µm<sup>2</sup> || ? µm<sup>2</sup> || | + | | ? µm<sup>2</sup> || ? µm<sup>2</sup> || 111 µm<sup>2</sup> || 0.50x || ? µm<sup>2</sup> || ? µm<sup>2</sup> || ? µm<sup>2</sup> || ? µm<sup>2</sup> || ? µm<sup>2</sup> || ? µm<sup>2</sup> || ? µm<sup>2</sup> || ? µm<sup>2</sup> |
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Revision as of 09:33, 25 April 2016
The 800 nm lithography process was a semiconductor manufacturing process used by the leading integrated circuit manufacturers in early 1990s. This process was later replaced by 650 nm, 600 nm, and 500 nm processes.
Industry
Fab |
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Process Name |
1st Production |
|
Contacted Gate Pitch |
Interconnect Pitch (M1P) |
SRAM bit cell |
Intel (BICMOS) | Intel (CHMOS V) | Intel (CMOS) | TI (CMOS) | TI (BiCMOS) | Cypress | AMD | Motorola | NEC | HP | HP | |
---|---|---|---|---|---|---|---|---|---|---|---|
P650 | CMOS26B | CMOS26G | |||||||||
1991 | 1990 | 1989 | 1991 | 1991 | 1989 | 1991 | 1991 | 1991 | 1991 | ||
Value | Value | Value | 1 µm Δ | Value | Value | Value | Value | Value | Value | Value | Value |
? nm | ? nm | ? nm | ?x | ? nm | ? nm | ? nm | ? nm | ? nm | ? nm | ? nm | ? nm |
? nm | ? nm | ? nm | ?x | ? nm | ? nm | ? nm | ? nm | ? nm | ? nm | ? nm | ? nm |
? µm2 | ? µm2 | 111 µm2 | 0.50x | ? µm2 | ? µm2 | ? µm2 | ? µm2 | ? µm2 | ? µm2 | ? µm2 | ? µm2 |
800 nm Microprocessors
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