From WikiChip
Difference between revisions of "22 nm lithography process"

(→‎Industry)
 
(28 intermediate revisions by 7 users not shown)
Line 3: Line 3:
  
 
== Industry ==
 
== Industry ==
−
The 22 nm became Intel's first generation of Tri-gate [[FinFET]] transistors and the first such transistor on the market. This process became 3rd generation high-k + metal gate transistors for Intel. Those transistors were not used in IBM's process
+
The 22 nm became Intel's first generation of Tri-gate [[FinFET]] transistors and the first such transistor on the market. This process became 3rd generation high-k + metal gate transistors for Intel. In 2017 Intel announce the introduction of a new process "22FFL" specifically for low power IOT and mobile products for their custom foundry.
  
−
{{scrolling table/top|style=text-align: right; | first=Fab
+
 
−
  |Process Name
+
{{finfet nodes comp
−
  |1st Production
+
<!-- Intel -->
−
  |Wafer
+
| process 1 fab          = [[Intel]]
−
  |&nbsp;
+
| process 1 name        = P1270 (CPU) / P1271 (SoC)
−
  |Fin Pitch
+
| process 1 date        = 2011
−
  |Fin Width
+
| process 1 lith        = 193 nm
−
  |Fin Height
+
| process 1 immersion    = Yes
−
  |Contacted Gate Pitch
+
| process 1 exposure    = [[SADP]]
−
  |Interconnect Pitch (M1P)
+
| process 1 wafer type  = Bulk
−
  |SRAM bit cell (HP)
+
| process 1 wafer size  = 300 mm
−
  |SRAM bit cell (HD)
+
| process 1 transistor  = FinFET
−
  |DRAM bit cell
+
| process 1 volt        = 0.75 V
 +
| process 1 delta from  = [[32 nm]] Δ
 +
| process 1 fin pitch    = 60 nm
 +
| process 1 fin pitch Δ  = -
 +
| process 1 fin width    = 8 nm
 +
| process 1 fin width Δ  =
 +
| process 1 fin height  = 34 nm
 +
| process 1 fin height Δ =
 +
| process 1 gate len    = 26 nm
 +
| process 1 gate len Δ  =
 +
| process 1 cpp          = 90 nm
 +
| process 1 cpp Δ        = 0.80x
 +
| process 1 mmp          = 80 nm
 +
| process 1 mmp Δ        = 0.71x
 +
| process 1 sram hp      = 0.130 µm²
 +
| process 1 sram hp Δ    = 0.65x
 +
| process 1 sram hd      = 0.092 µm²
 +
| process 1 sram hd Δ    = 0.62x
 +
| process 1 sram lv      = 0.108 µm²
 +
| process 1 sram lv Δ    = 0.63x
 +
| process 1 dram        = 0.029 µm²
 +
| process 1 dram Δ      = &nbsp;
 +
<!-- Intel 22FFL -->
 +
| process 2 fab          = [[Intel]]
 +
| process 2 name        = 22FFL (P1222)
 +
  | process 2 date        = 2017
 +
  | process 2 lith        = 193 nm
 +
  | process 2 immersion    = Yes
 +
  | process 2 exposure    = [[SADP]]
 +
| process 2 wafer type  = Bulk
 +
| process 2 wafer size  = 300 mm
 +
| process 2 transistor  = FinFET
 +
| process 2 volt        = 0.7 V
 +
| process 2 delta from  = [[32 nm]] Δ
 +
| process 2 fin pitch    = 45 nm
 +
| process 2 fin pitch Δ  = -
 +
| process 2 fin width    = &nbsp;
 +
  | process 2 fin width Δ  =
 +
  | process 2 fin height  = &nbsp;
 +
| process 2 fin height Δ =
 +
  | process 2 gate len    = 30 nm
 +
  | process 2 gate len Δ  = -
 +
  | process 2 cpp          = 108 nm
 +
| process 2 cpp Δ        = -
 +
| process 2 mmp          = 90 nm
 +
| process 2 mmp Δ        = -
 +
| process 2 sram hp      = &nbsp;
 +
| process 2 sram hp Δ    = -
 +
| process 2 sram hd      = 0.088 µm²
 +
| process 2 sram hd Δ    = -
 +
| process 2 sram lv      = &nbsp;
 +
| process 2 sram lv Δ    = -
 +
| process 2 dram        = &nbsp;
 +
| process 2 dram Δ      = -
 +
<!-- Samsung -->
 +
| process 3 fab          = [[IBM]]
 +
| process 3 name        = 22HP
 +
| process 3 date        = 2013
 +
| process 3 lith        = 193
 +
| process 3 immersion    = Yes
 +
| process 3 exposure    = &nbsp;
 +
| process 3 wafer type  = SOI
 +
| process 3 wafer size  = 300 mm
 +
| process 3 transistor  = Planar
 +
| process 3 volt        = 0.75 V
 +
| process 3 delta from  = [[32 nm]] Δ
 +
| process 3 fin pitch    = -
 +
| process 3 fin pitch Δ  =
 +
| process 3 fin width    =
 +
| process 3 fin width Δ  =
 +
| process 3 fin height  =
 +
| process 3 fin height Δ =
 +
| process 3 gate len    = 25-33 nm
 +
| process 3 gate len Δ  = 0.83-1.1x
 +
| process 3 cpp          = 100 nm
 +
| process 3 cpp Δ        = 0.79x
 +
| process 3 mmp          = 80 nm
 +
| process 3 mmp Δ        = 0.80x
 +
| process 3 sram hp      = 0.144 µm²
 +
| process 3 sram hp Δ    = &nbsp;
 +
| process 3 sram hd      = 0.128 µm²
 +
| process 3 sram hd Δ    = 0.86x
 +
| process 3 sram lv      = &nbsp;
 +
  | process 3 sram lv Δ    = &nbsp;
 +
  | process 3 dram        = 0.026 µm²
 +
  | process 3 dram Δ      = 0.67x
 
}}
 
}}
−
{{scrolling table/mid}}
+
 
−
|-
+
=== Intel ===
−
! colspan="2" | [[Intel]] !! colspan="2" | Common Platform<info>[[IBM]] / [[GlobalFoundries]] / [[AMD]] / [[Freescale]] / [[STMicroelectronics]] / [[Toshiba]] / CNSE</info>
+
[[File:intel 22nm tri-gate transistors.png|650px]]
−
|- style="text-align: center;"
 
−
| colspan="2" | P1270 || colspan="2" |
 
−
|- style="text-align: center;"
 
−
| colspan="2" | 2011 || colspan="2" | 2012
 
−
|- style="text-align: center;"
 
−
| colspan="6" | 300mm
 
−
|-
 
−
! Value !! [[32 nm]] Δ !! Value !! [[32 nm]] Δ
 
−
|-
 
−
| 60 nm || colspan="3" rowspan="3" style="text-align: center;" | N/A
 
−
|-
 
−
| 32 nm
 
−
|-
 
−
| 8 nm
 
−
|-
 
−
| 90 nm || 0.80x || 100 nm || 0.79x
 
−
|-
 
−
| 80 nm || 0.71x || 80 nm || ?x
 
−
|-
 
−
| 0.1080 µm<sup>2</sup> || 0.63x || 0.1 µm<sup>2</sup>  || 0.67x
 
−
|-
 
−
| 0.092 µm<sup>2</sup> || ?x
 
−
|-
 
−
| || || 0.026 µm<sup>2</sup> || 0.67x
 
−
{{scrolling table/end}}
 
−
=== Design Rules ===
 
 
{| class="wikitable collapsible collapsed"
 
{| class="wikitable collapsible collapsed"
 
|-
 
|-
−
! colspan="6" | Intel 22nm SoC Interconnect Design Rules
+
! colspan="7" | Intel 22nm SoC Interconnect Design Rules
 
|-
 
|-
−
! Layer !! Pitch !! Process !! Dielectric Materials !! [[CPU]] !! [[SoC]]
+
! Layer !! Pitch !! Process !! Dielectric Materials !! [[CPU]] !! [[SoC]] || Image
 
|-
 
|-
−
| Fin || 60 nm || - || - || Fin || Fin
+
| Fin || 60 nm || - || - || Fin || Fin || rowspan="9" | [[File:intel 22nm rules.png]]
 
|-
 
|-
 
| Contact || 90 nm || SAC || - || Contact || Contact
 
| Contact || 90 nm || SAC || - || Contact || Contact
Line 72: Line 131:
 
| MT - TOP || 14 µm || Plate Up || Polymer || M9 || Top Metal
 
| MT - TOP || 14 µm || Plate Up || Polymer || M9 || Top Metal
 
|}
 
|}
 +
 +
 +
{| class="wikitable collapsible collapsed"
 +
|-
 +
! colspan="7" | Intel 22nm SoC Transistor Characteristics
 +
|-
 +
! Transistor Type !! colspan="2" | High Speed Logic !! colspan="2" | Low Power Logic !! colspan="2" | High Voltage Logic
 +
|-
 +
| Options || High Performance (HP) || Standard Perf/Power (SP) || Low Power (LP) || Ultra-Low Power (ULP) || 1.8 V || 3.3 V
 +
|-
 +
| V<sub>dd</sub> (V) || 0.7 V / 1 V || 0.75 V / 1 V || 0.75 V / 1 V || 0.75 V / 1.2 V || 1.5 V / 1.8 V / 3.3 V || 3.3 V / >5V
 +
|-
 +
| Gate Pitch (nm) || 90 || 90 || 90 || 108 || min. 180 || min 450
 +
|-
 +
| L<sub>gate</sub> (nm) || 30 || 34 || 34 || 40 || min. 80 || in 280
 +
|-
 +
| N/PMOS Idsat/Ioff (mA/µm) || 1.08/0.91 @ 0.75 V, 100 nA/µm || 0.71/0.59 @0.75 V, 1 nA/µm || 0.41/0.37 @ 0.75 V, 30 pA/µm || 0.35/0.33 @ 0.75 V, 15 pA/µm || 0.92/0.8 @ 1.8 V, 10 pA/µm || 1/0.8 @ 3.3 V, 10 pA/µm
 +
|}
 +
 +
== Find models ==
 +
{{#ask:
 +
[[instance of::microprocessor]]
 +
[[process::22 nm]]
 +
| ?full page name
 +
| ?name
 +
| ?microprocessor family
 +
| ?microarchitecture
 +
| ?process
 +
| ?designer
 +
| ?manufacturer
 +
| ?first launched
 +
| ?base frequency
 +
| format=template|link=all|sort=name|order=asc|headers=hide|mainlabel=-|intro=<table class="wikitable"><tr><th colspan="8">[[22 nm]] Microprocessors</th></tr><tr><th colspan="3">Model</th><th colspan="5">Specs</th></tr><tr><th>Model</th><th>Family</th><th>µarch</th><th>Process</th><th>Designer</th><th>Manufacturer</th><th>Intro</th><th>Freq</th></tr>|outro=</table>|limit=0|searchlabel=Click to browse all 22 nm MPU models|sep=,|template=proc table 1|userparam=9
 +
}}
  
 
== 22 nm Microprocessors==
 
== 22 nm Microprocessors==
Line 80: Line 173:
 
** {{intel|Core i7EE}}
 
** {{intel|Core i7EE}}
 
** {{intel|Xeon}}
 
** {{intel|Xeon}}
 +
** {{intel|Xeon E3}}
 +
** {{intel|Xeon E5}}
 +
** {{intel|Xeon E7}}
 
{{expand list}}
 
{{expand list}}
  
Line 96: Line 192:
 
}}
 
}}
  
−
== 22 nm System on Chips==
+
== 22 nm Microarchitectures==
 +
* Intel
 +
** {{intel|Haswell|l=arch}}
 +
** {{intel|Ivy Bridge|l=arch}}
 +
** {{intel|Silvermont|l=arch}}
 +
* IBM
 +
** {{ibm|POWER8|l=arch}}
 +
** {{ibm|z13|l=arch}}
 
{{expand list}}
 
{{expand list}}
  
−
== 22 nm Microarchitectures==
+
== Documents ==
−
* Intel:
+
* [[:File:22FFL-2017.pdf|Intel's 22FFL technology]]
−
** {{intel|Haswell}}
 
−
** {{intel|Ivy Bridge}}
 
−
** {{intel|Silvermont}}
 
−
 
 
−
{{expand list}}
 
  
 +
== References ==
 +
* IEDM 2012
 +
* IEDM 2014
 +
* ISSCC 2015
  
−
[[Category:Lithography]]
+
[[category:lithography]]

Latest revision as of 08:52, 25 November 2020

basic wafer drawing.svg Semiconductor lithography processes technology
v · d · e

The 22 nanometer (22 nm) lithography process is a full node semiconductor manufacturing process following the 28 nm process stopgap. The term "22 nm" is simply a commercial name for a generation of a certain size and its technology, as opposed to gate length or half pitch. Commercial integrated circuit manufacturing using 22 nm process began in 2008 for memory and 2012 for MPUs. This technology was replaced by with 20 nm process (HN) in 2014 and 16 nm process (FN) in late 2015.

Industry[edit]

The 22 nm became Intel's first generation of Tri-gate FinFET transistors and the first such transistor on the market. This process became 3rd generation high-k + metal gate transistors for Intel. In 2017 Intel announce the introduction of a new process "22FFL" specifically for low power IOT and mobile products for their custom foundry.


 
Process Name
1st Production
Lithography Lithography
Immersion
Exposure
Wafer Type
Size
Transistor Type
Voltage
 
Fin Pitch
Width
Height
Gate Length (Lg)
Contacted Gate Pitch (CPP)
Minimum Metal Pitch (MMP)
SRAM bitcell High-Perf (HP)
High-Density (HD)
Low-Voltage (LV)
DRAM bitcell eDRAM
Intel Intel IBM
P1270 (CPU) / P1271 (SoC) 22FFL (P1222) 22HP
2011 2017 2013
193 nm 193 nm 193
Yes Yes Yes
SADP SADP  
Bulk Bulk SOI
300 mm 300 mm 300 mm
FinFET FinFET Planar
0.75 V 0.7 V 0.75 V
Value 32 nm Δ Value 32 nm Δ Value 32 nm Δ
60 nm N/A 45 nm N/A N/A
8 nm  
34 nm  
26 nm 30 nm 25-33 nm 0.83-1.1x
90 nm 0.80x 108 nm 100 nm 0.79x
80 nm 0.71x 90 nm 80 nm 0.80x
0.130 µm² 0.65x   0.144 µm²  
0.092 µm² 0.62x 0.088 µm² 0.128 µm² 0.86x
0.108 µm² 0.63x      
0.029 µm²     0.026 µm² 0.67x

Intel[edit]

intel 22nm tri-gate transistors.png


Find models[edit]

Click to browse all 22 nm MPU models

22 nm Microprocessors[edit]

This list is incomplete; you can help by expanding it.


Click to browse all 22 nm MPU models

22 nm Microarchitectures[edit]

This list is incomplete; you can help by expanding it.

Documents[edit]

References[edit]

  • IEDM 2012
  • IEDM 2014
  • ISSCC 2015
Retrieved from "https://en.wikichip.org/w/index.php?title=22_nm_lithography_process&oldid=98206"