Semiconductor & Computer Engineering
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Difference between revisions of "1.5 µm lithography process"
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{{lithography processes}} | {{lithography processes}} | ||
| − | The '''1.5 µm lithography process''' was the semiconductor process technology used by the major semiconductor companies in the mid 1980s. By the late 80s this process was replaced by [[1.3 µm]], [[1.2 µm]], and [[1 µm]] processes. | + | The '''1.5 µm lithography process''' was the semiconductor process technology used by the major semiconductor companies in the mid 1980s. This process had an effective channel length of roughly 1.5 µm between the source and drain. By the late 80s this process was replaced by [[1.3 µm]], [[1.2 µm]], and [[1 µm]] processes. |
== Industry == | == Industry == | ||
| Line 14: | Line 14: | ||
{{scrolling table/mid}} | {{scrolling table/mid}} | ||
|- | |- | ||
| − | ! [[Intel]] || [[Intel]] | + | ! [[Intel]] || [[Intel]] || [[Intel]] || [[HP]] || [[AMD]] || [[DEC]] |
|- style="text-align: center;" | |- style="text-align: center;" | ||
| − | | | + | | HMOS-II || HMOS-E || P646 (CHMOS III) || NMOS III || || CMOS-2 |
|- style="text-align: center;" | |- style="text-align: center;" | ||
| − | | 1982 || 1985 || 1981 || 1982 | + | | 1982 || 1982 || 1985 || 1981 || 1982 || |
|- | |- | ||
| − | | ? nm || ? nm || 1.5 µm || | + | | ? nm || ? nm || ? nm || 1.5 µm || || |
|- | |- | ||
| − | | ? nm || ? nm || 2.5 µm || | + | | ? nm || ? nm || ? nm || 2.5 µm || || |
|- | |- | ||
| − | | 2 || 2 || 2 || 2 | + | | 2 || ? || 2 || 2 || 2 || 2 |
|- | |- | ||
| − | | ? | + | | ? µm² || ? µm² || ? µm² || ? µm² || ? µm² || |
|- | |- | ||
| − | | 125 mm || 150 mm || || | + | | 125 mm || || 150 mm || || || |
{{scrolling table/end}} | {{scrolling table/end}} | ||
| − | === | + | === HP === |
{| class="wikitable collapsible collapsed" | {| class="wikitable collapsible collapsed" | ||
|- | |- | ||
| − | ! colspan=" | + | ! colspan="3" | [[HP]] NMOS-III Design Rules |
|- | |- | ||
! Layer !! Description | ! Layer !! Description | ||
| Line 45: | Line 45: | ||
|- | |- | ||
| M2 || 5.0 µm wide line / 3.0 µm space<br>0.4 ohm/square sheet resistance | | M2 || 5.0 µm wide line / 3.0 µm space<br>0.4 ohm/square sheet resistance | ||
| + | |} | ||
| + | |||
| + | === DEC === | ||
| + | [[DEC]] operated their 1.5 µm process ('''CMOS-2''') at their Hudson foundry. This 2 ML process had an effective channel length of 0.9 µm with a polycide width of 1.5 µm (1.5 µm spacing) and a T<sub>OX</sub> of 22.5 nm. | ||
| + | |||
| + | {| class="wikitable collapsible collapsed" | ||
| + | |- | ||
| + | ! colspan="2" | [[DEC]] Design Rules | ||
| + | |- | ||
| + | ! !! Width !! Spacing | ||
| + | |- | ||
| + | | Polycide || 1.5 µm || 1.5 µm | ||
| + | |- | ||
| + | | Metal 1 || 3 µm || 1.5 µm | ||
| + | |- | ||
| + | | Metal 1 Contact || 1.5 µm x 1.5 µm | ||
| + | |- | ||
| + | | Metal 2 || 3.75 µm || 1.5 | ||
| + | |- | ||
| + | | Metal 2 Contact || 1.5 µm x 1.5 µm | ||
|} | |} | ||
| Line 61: | Line 81: | ||
{{expand list}} | {{expand list}} | ||
| − | [[ | + | == 1.5 µm Microarchitectures == |
| + | * ARM | ||
| + | ** {{armh|ARM3|l=arch}} | ||
| + | * Intel | ||
| + | ** {{intel|80386|l=arch}} | ||
| + | {{expand list}} | ||
| + | * DEC | ||
| + | ** {{decc|MicroPrism|l=arch}} | ||
| + | ** {{decc|MicroTitan|l=arch}} | ||
| + | |||
| + | |||
| + | [[category:lithography]] | ||
Latest revision as of 22:04, 20 May 2018
Semiconductor lithography processes technology
The 1.5 µm lithography process was the semiconductor process technology used by the major semiconductor companies in the mid 1980s. This process had an effective channel length of roughly 1.5 µm between the source and drain. By the late 80s this process was replaced by 1.3 µm, 1.2 µm, and 1 µm processes.
Industry[edit]
| Fab |
|---|
| Process Name |
| 1st Production |
| Contacted Gate Pitch |
| Interconnect Pitch (M1P) |
| Metal Layers |
| SRAM bit cell |
| Wafer |
| Intel | Intel | Intel | HP | AMD | DEC |
|---|---|---|---|---|---|
| HMOS-II | HMOS-E | P646 (CHMOS III) | NMOS III | CMOS-2 | |
| 1982 | 1982 | 1985 | 1981 | 1982 | |
| ? nm | ? nm | ? nm | 1.5 µm | ||
| ? nm | ? nm | ? nm | 2.5 µm | ||
| 2 | ? | 2 | 2 | 2 | 2 |
| ? µm² | ? µm² | ? µm² | ? µm² | ? µm² | |
| 125 mm | 150 mm |
HP[edit]
| HP NMOS-III Design Rules | ||
|---|---|---|
| Layer | Description | |
| Oxide | 450 nm thick silicon dioxide 1.5 µm x 1.5 µm minimum contact area, zero overlap to polysilicon, zero overlap of first metal layer | |
| M1 | 1.5 µm wide line / 1.0 µm space 0.4 ohm/square sheet resistance | |
| Intemediate Oxide | 550 nm-thick silicon dioxide 1.5 µm x 2.0 µm minimum contact area, zero overlap to first metal layer 2.0 µm overlap of second metal layer to via | |
| M2 | 5.0 µm wide line / 3.0 µm space 0.4 ohm/square sheet resistance | |
DEC[edit]
DEC operated their 1.5 µm process (CMOS-2) at their Hudson foundry. This 2 ML process had an effective channel length of 0.9 µm with a polycide width of 1.5 µm (1.5 µm spacing) and a TOX of 22.5 nm.
| DEC Design Rules | ||
|---|---|---|
| Width | Spacing | |
| Polycide | 1.5 µm | 1.5 µm |
| Metal 1 | 3 µm | 1.5 µm |
| Metal 1 Contact | 1.5 µm x 1.5 µm | |
| Metal 2 | 3.75 µm | 1.5 |
| Metal 2 Contact | 1.5 µm x 1.5 µm | |
1.5 µm Microprocessors[edit]
This list is incomplete; you can help by expanding it.
1.5 µm Microarchitectures[edit]
This list is incomplete; you can help by expanding it.
- DEC