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2.5 µm lithography process
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The 2.5 μm lithography process was the semiconductor process technology used by some semiconductor companies during the late 1970s to early 1980s. This process was later superseded by 2 µm, 1.5 µm, and 1 µm processes.



Harris Corporation operated a 2.5 μm CMOS process, SAJI IV (Self-Aligned) .

2.5 μm microprocessors[edit]

2.5 μm microcontrollers[edit]

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