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1.3 µm lithography process

The 1.2 µm lithography process was the semiconductor process technology used by the major semiconductor companies between in the late 1980s. 1 µm was phased out in the early 1990s and was replaced by 1 µm, 800 nm, and 650 nm processes.


Process Name​
1st Production​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell
Motorola Hitachi Fujitsu
1987 1987
Value Value Value
 ? nm  ? nm  ? nm
 ? nm  ? nm  ? nm
 ? µm2  ? µm2  ? µm2

1.3 µm Microprocessors

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