The 65 nanometer (65 nm) lithography process is a full node semiconductor manufacturing process following the 80 nm process stopgap. Commercial integrated circuit manufacturing using 65 nm process began in 2005. This technology was superseded by the 55 nm process (HN) / 45 nm process (FN) in 2007.

Industry

Fab
Process Name​
1st Production​
Wafer​
Metal Layers​
​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell (HD)​
SRAM bit cell (LP)​
DRAM bit cell

Intel		IBM / Toshiba / Sony / AMD		TI		IBM / Chartered / Infineon / Samsung		TSMC		Fujitsu
P1264										CS-200/CS-201/CS-250
2005		2005		2007		2005		2005		2006
300mm
8		10		11		10				11
Value	90 nm Δ	Value	90 nm Δ	Value	90 nm Δ	Value	90 nm Δ	Value	90 nm Δ	Value	90 nm Δ
220 nm	0.85x	250 nm	?x	? nm	?x	200 nm	0.82x	160 nm	0.67x	? nm	?x
210 nm	0.95x	? nm	?x	? nm	?x	180 nm	0.73	180 nm	0.75x	? nm	?x
0.570 µm²	0.57x	0.540 µm²		0.49 µm²		0.540 µm²	0.55x	0.499 µm²	0.50x
0.680 µm²		0.65 µm²	0.65x	0.49 µm²		0.676 µm²	0.54x	0.525 µm²	0.53x	? µm²	?x
		0.127 µm²	0.67x			0.189 µm²	0.69x

Design Rules

Intel 65nm Design Rules
Layer	Pitch	Thick	Aspect Ratio
Isolation	220 nm	320 nm	-
Polysilicon	220 nm	90 nm	-
Contacted Gate	220 nm		-
Metal 1	210 nm	170 nm	1.6
Metal 2	210 nm	190 nm	1.8
Metal 3	220 nm	200 nm	1.8
Metal 4	280 nm	250 nm	1.8
Metal 5	330 nm	300 nm	1.8
Metal 6	480 nm	430 nm	1.8
Metal 7	720 nm	650 nm	1.8
Metal 8	1.80 µm	975 nm	1.8

65 nm Microprocessors

• AMD
  • Athlon 64 X2
  • Athlon X2
  • Opteron
  • Phenom
  • Turion 64 X2
• Fujitsu
  • SPARC64 VII
• IBM
  • Power6
• Intel
  • Celeron
  • Core 2 Duo
  • Core 2 Extreme
  • Core 2 Quad
  • Core 2 Quad Extreme
  • Core Duo
  • Pentium 4
  • Pentium D
  • Pentium Extreme Edition
  • Pentium Dual-Core
  • Xeon
• Loongson
  • Godson 2
• Qualcomm
  • MSM6xxx
• Sun
  • UltraSPARC T2

This list is incomplete; you can help by expanding it.

65 nm Microarchitectures

• AMD
  • K8
  • K10
• ARM
  • ARM7
• IBM
  • z10
• Intel
  • Core
• Movidius
  • SHAVE v2.0
• VIA Technologies
  • Isaiah

This list is incomplete; you can help by expanding it.

Documents

• Samsung foundry - 45 nm, 65 nm, 90 nm guide (August, 2007)