The 1 µm lithography process was the semiconductor process technology used by the major semiconductor companies between in the late 1980s. 1 µm was phased out in the early 1990s and was replaced by 800 nm, 650 nm, and 600 nm processes.

Industry

Fab
Process Name​
1st Production​
​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell

Intel (CHMOS IV)	HP	National (BiCMOS)
P648	CMOS26	BiCMOS III
1987	1991	1988
Value	Value	Value
? nm	? nm	? nm
? nm	? nm	? nm
220 µm2	? µm2	? µm2

1 µm Microprocessors

• Intel
  • 80388 DX
  • 80386 SX
  • 80486 DX
• MIPS
  • R4000
• HP
  • PA-7000
• Hitachi
  • H32/200

This list is incomplete; you can help by expanding it.

1 µm Microcontrollers

• Intel
  • MCS-96

This list is incomplete; you can help by expanding it.