The 1 µm lithography process was the semiconductor process technology used by the major semiconductor companies between in the late 1980s. 1 µm was phased out in the early 1990s and was replaced by 800 nm, 650 nm, and 600 nm processes.

Industry

Fab
Process Name​
1st Production​
​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell

Intel (CHMOS IV)	HP
P648	CMOS26
1987	1991
Value	Value
? nm	? nm
? nm	? nm
? µm2	? µm2

1 µm Microprocessors

• Intel
  • 80388 DX
  • 80386 SX
  • 80486 DX
• MIPS
  • R4000
• HP
  • PA-7000

1 µm Microcontrollers

• Intel
  • MCS-96