Semiconductor & Computer Engineering
Semiconductor lithography processes technology
The 3 nanometer (3 nm or 30 Å) lithography process is a technology node semiconductor manufacturing process following the 5 nm process node. Commercial integrated circuit manufacturing using 3 nm process is set to begin some time around 2023.
The term "3 nm" is simply a commercial name for a generation of a certain size and its technology, and does not represent any geometry of the transistor.
Contents
Industry
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Preliminary Data! Information presented in this article deal with future products, data, features, and specifications that have yet to be finalized, announced, or released. Information may be incomplete and can change by final release. |
| Process Name | |
|---|---|
| 1st Production | |
| Lithography | Lithography |
| Immersion | |
| Exposure | |
| Wafer | Type |
| Size | |
| Transistor | Type |
| Voltage | |
| Fin | Pitch |
| Width | |
| Height | |
| Gate Length (Lg) | |
| Contacted Gate Pitch (CPP) | |
| Minimum Metal Pitch (MMP) | |
| SRAM bitcell | High-Perf (HP) |
| High-Density (HD) | |
| Low-Voltage (LV) | |
| DRAM bitcell | eDRAM |
| Intel | TSMC | Samsung | |||
|---|---|---|---|---|---|
| P1278 (CPU), P1279? (SoC) | N3, N3E N3 Enhanced |
3GAE 3nm Gate All Around Early , 3GAP3nm Gate All Around
| process 1 date = 1H 2022Plus | |||
| 2H 2023 | 2H 2022 | ||||
| EUV | EUV | EUV | |||
| SE | SE | SE | |||
| Bulk | Bulk | Bulk | |||
| 300 mm | 300 mm | 300 mm | |||
| FinFET | FinFET | GAA | |||
| Value | 5 nm Δ | Value | 5 nm Δ | Value | 5 nm Δ |
| N/A | |||||
P1278
Intel's 5-nanometer (renamed as Intel 20A) process node is expected to ramp around the 2H2024/2025 timeframe.
Samsung
On May 24 2017 Samsung announced they will be switching to a transistor they call Multi-Bridge-Channel FET (MBCFET), an extension of a Gate-all-around (GAA) FET. This is planned for somewhere after the 5nm node but the exact timeline or specification is currently unknown.
TSMC
N3 technology will offer up to 70% logic density gain, up to 15% speed improvement at the same power and up to 30% power reduction at the same speed as compared with N5 technology (According to TSMCs website). If this holds true we could see 300+ MT/mm2.
3 nm Microprocessors
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3 nm Microarchitectures
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References
- Kinam Kim, President of Semiconductor Business, announced MBCFET for the node after 5 nm, May 24, 2017