The 80 nm lithography process is a half-node semiconductor manufacturing process used as a stopgap between the 90 nm and 65 nm processes. Commercial integrated circuit manufacturing using 40 nm process began around 2004. This technology superseded by commercial 65 nm process by 2006.

Industry

Fab
1st Production​
Wafer​
​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell

TSMC		Samsung
2005		2005
300mm
Value	90 nm Δ	Value	90 nm Δ
? nm	?x	? nm	?x
? nm	?x	? nm	?x
? µm2	?x	? µm2	?x

80 nm Microprocessors

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80 nm System on Chips

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