The 220 nm lithography process is was semiconductor manufacturing process following the 350 nm process. Commercial integrated circuit manufacturing using 220 process began in late 1990s. 220 nm and was phased out and later replaced by 180 nm processes.

Industry

Fab
Process Name​
1st Production​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
Metal Layers​
SRAM bit cell

Motorola	IBM
HiPerMOS 5	CMOS-7S
1999	1999
? nm	? nm
? nm	?nm
6	6
? µm2	? µm2

220 nm Microprocessors

• IBM
  • Power3-II
  • RS64-III
• Motorola
  • PowerPC

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220 nm Microarchitectures

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