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Difference between revisions of "180 nm lithography process"

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The 180 nm process was first to use Cu metalization as a replacement for Al for interconnects.
 
The 180 nm process was first to use Cu metalization as a replacement for Al for interconnects.
 
== Industry ==
 
== Industry ==
−
Fujitsu's 0.18 micron process (''CS-80'') is 6-layer FSG based.
 
 
{{scrolling table/top|style=text-align: right; | first=Fab
 
{{scrolling table/top|style=text-align: right; | first=Fab
 
  |Process Name
 
  |Process Name
 
  |1st Production
 
  |1st Production
 +
|Metal Layers
 
  | 
 
  | 
 
  |Contacted Gate Pitch
 
  |Contacted Gate Pitch
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{{scrolling table/mid}}
 
{{scrolling table/mid}}
 
|-
 
|-
−
! colspan="2" | [[Intel]] !! colspan="2" | [[Fujitsu]] !! colspan="2" | [[TSMC]] !! colspan="2" | [[Motorola]]
+
! colspan="2" | [[Intel]] !! colspan="2" | [[Fujitsu]] !! colspan="2" | [[TSMC]] !! colspan="2" | [[Motorola]] !! colspan="2" | [[IBM]] !! colspan="2" | [[NEC]] !! colspan="2" | [[Samsung]] !! colspan="2" | [[TI]] !! colspan="2" | [[TI]]
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | P858 || colspan="2" | CS-80 || colspan="2" |  || colspan="2" | HiPerMOS 6
+
| colspan="2" | P858 || colspan="2" | CS-80 || colspan="2" |  || colspan="2" | HiPerMOS 6 || colspan="2" | CMOS-8S3 || colspan="2" |  || colspan="2" |  || colspan="2" | C07a || colspan="2" | GS30
 
|- style="text-align: center;"
 
|- style="text-align: center;"
−
| colspan="2" | 1999 || colspan="2" | 2000 || colspan="2" | 2000 || colspan="2" | 2000
+
| colspan="2" | 1999 || colspan="2" | 2000 || colspan="2" | 2000 || colspan="2" | 2000 || colspan="2" | 1998 || colspan="2" | 2000 || colspan="2" | 2001 || colspan="2" |  || colspan="2" | 2000
 +
|- style="text-align: center;"
 +
| colspan="2" | 7 || colspan="2" | 6 || colspan="2" | 6 || colspan="2" | 7 || colspan="2" | 7 || colspan="2" |  || colspan="2" |  || colspan="2" | 6 || colspan="2" | 5
 
|-
 
|-
−
! Value !! [[250 nm]] Δ !! Value !! [[250 nm]] Δ !! Value !! [[250 nm]] Δ !! Value !! [[220 nm]] Δ
+
! Value !! [[250 nm]] Δ !! Value !! [[250 nm]] Δ !! Value !! [[250 nm]] Δ !! Value !! [[220 nm]] Δ !! Value !! [[250 nm]] Δ !! Value !! [[250 nm]] Δ !! Value !! [[250 nm]] Δ !! Value !! [[250 nm]] Δ !! Value !! [[250 nm]] Δ
 
|-
 
|-
−
| 480 nm || 0.96x || ? nm || ?x || ? nm || ?x || ? nm || ?x
+
| 480 nm || 0.96x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x
 
|-
 
|-
−
| 500 nm || 0.82x || ? nm || ?x || ? nm || ?x || ? nm || ?x
+
| 500 nm || 0.82x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x
 
|-
 
|-
−
| 5.59 µm<sup>2</sup> || 0.54x || 4.18 µm<sup>2</sup> || ?x || 4.65 || 0.62x || ? µm<sup>2</sup>  || ?x
+
| 5.59 µm<sup>2</sup> || 0.54x || 4.18 µm<sup>2</sup> || ?x || 4.65 || 0.62x || ? µm<sup>2</sup>  || ?x || ? µm<sup>2</sup>  || ?x || ? µm<sup>2</sup>  || ?x || ? µm<sup>2</sup>  || ?x || ? µm<sup>2</sup>  || ?x || ? µm<sup>2</sup>  || ?x
 
{{scrolling table/end}}
 
{{scrolling table/end}}
  

Revision as of 00:42, 27 April 2016

basic wafer drawing.svg Semiconductor lithography processes technology
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The 180 nm lithography process is a full node semiconductor manufacturing process following the 220 nm process stopgap. Commercial integrated circuit manufacturing using 180 nm process began in late 1998. This technology was replaced by with 150 nm process (HN) in 2000 and 130 nm process (FN) in 2001.

Industry

The 180 nm process was first to use Cu metalization as a replacement for Al for interconnects.

Industry

Fab
Process Name​
1st Production​
Metal Layers​
 ​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell
Intel Fujitsu TSMC Motorola IBM NEC Samsung TI TI
P858 CS-80 HiPerMOS 6 CMOS-8S3 C07a GS30
1999 2000 2000 2000 1998 2000 2001 2000
7 6 6 7 7 6 5
Value 250 nm Δ Value 250 nm Δ Value 250 nm Δ Value 220 nm Δ Value 250 nm Δ Value 250 nm Δ Value 250 nm Δ Value 250 nm Δ Value 250 nm Δ
480 nm 0.96x  ? nm  ?x  ? nm  ?x  ? nm  ?x  ? nm  ?x  ? nm  ?x  ? nm  ?x  ? nm  ?x  ? nm  ?x
500 nm 0.82x  ? nm  ?x  ? nm  ?x  ? nm  ?x  ? nm  ?x  ? nm  ?x  ? nm  ?x  ? nm  ?x  ? nm  ?x
5.59 µm2 0.54x 4.18 µm2  ?x 4.65 0.62x  ? µm2  ?x  ? µm2  ?x  ? µm2  ?x  ? µm2  ?x  ? µm2  ?x  ? µm2  ?x

180 nm Microprocessors

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180 nm Microarchitectures

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