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From WikiChip
110 nm lithography process
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Semiconductor lithography processes technology |
|
The 110 nanometer (110 nm) lithography process is a half-node semiconductor manufacturing process used as a stopgap between the 130 nm and 90 nm processes. 110 nm process was used in the early 2000s.
Industry[edit]
Fab |
---|
Process Name |
1st Production |
Type |
|
Contacted Gate Pitch |
Interconnect Pitch (M1P) |
SRAM bit cell |
TSMC | UMC | On Semi | |||
---|---|---|---|---|---|
SP110 | |||||
2003 | |||||
Bulk | |||||
Value | 130 nm Δ | Value | 130 nm Δ | Value | 130 nm Δ |
? nm | ?x | ? nm | ?x | ? nm | ?x |
? nm | ?x | 320 nm | ?x | ? nm | ?x |
? µm2 | ?x | ? µm2 | ?x | ? µm2 | ?x |
110 nm Microprocessors[edit]
This list is incomplete; you can help by expanding it.