From WikiChip
7 µm lithography process

The 7μm lithography process was the semiconductor process technology used by some semiconductor companies during the early to mid 1970s. This process was later superseded by 6 µm, 6 µm, and 3 µm processes.

Industry

Fab
Process Name​
1st Production​
Contacted Gate Pitch​
Interconnect Pitch​
Metal Layers​
Technology​
Wafer
HP
NMOS I
1970
 ? nm
 ? nm
 
nMOS
51 mm

7μm chips

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