The 3 μm lithography process was the semiconductor process technology used by some semiconductor companies during the mid 1970s to the mid 1980s.

Industry

Fab
Process Name​
1st Production​
Voltage​
​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell

Hitachi
Hi-CMOS I
?
5 V
Value
3 µm
3 µm
? µm²

3 μm Microprocessors

• Intel
  • 8085
  • 8086
  • 8088
  • 80186
• Novix NC4016
• Dec
  • MicroVAX 78032
• Siemens
  • SAB 80199
• Fairchild
  • 6800
• Toshiba
  • 8085
• National
  • COPS II
• ARM
  • ARM1

This list is incomplete; you can help by expanding it.

3 μm Microcontrollers

• Intel
  • MCS-41
  • MCS-48
  • MCS-51

3 μm Chips

• Intel
  • 8087
  • 8089
  • 8220
• National
  • 32081
• AMD
  • 2901

References

• Meguro, S., et al. "Hi-CMOS III technology." Electron Devices Meeting, 1984 International. IEEE, 1984.