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Difference between revisions of "3 µm lithography process"

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== References ==
 
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* Meguro, S., et al. "Hi-CMOS III technology." Electron Devices Meeting, 1984 International. IEEE, 1984.
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[[Category:Lithography]]
 
[[Category:Lithography]]

Revision as of 05:38, 4 April 2017

The 3 μm lithography process was the semiconductor process technology used by some semiconductor companies during the mid 1970s to the mid 1980s.

Industry

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3 μm Microprocessors

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3 μm Microcontrollers

3 μm Chips

References

  • Meguro, S., et al. "Hi-CMOS III technology." Electron Devices Meeting, 1984 International. IEEE, 1984.