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Difference between revisions of "3 µm lithography process"

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Revision as of 04:56, 4 April 2017

The 3 μm lithography process was the semiconductor process technology used by some semiconductor companies during the mid 1970s to the mid 1980s.

Industry

Fab
Process Name​
1st Production​
Voltage​
 ​
Contacted Gate Pitch​
Interconnect Pitch (M1P)​
SRAM bit cell
Hitachi
Hi-CMOS I
 ?
5 V
Value
3 µm
3 µm
 ? µm²

3 μm Microprocessors

This list is incomplete; you can help by expanding it.

3 μm Microcontrollers

3 μm Chips

References

  • Meguro, S., et al. "Hi-CMOS III technology." Electron Devices Meeting, 1984 International. IEEE, 1984.