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Difference between revisions of "3 µm lithography process"
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== Industry == | == Industry == | ||
− | {{ | + | {{scrolling table/top|style=text-align: right; | first=Fab |
+ | |Process Name | ||
+ | |1st Production | ||
+ | | | ||
+ | |Contacted Gate Pitch | ||
+ | |Interconnect Pitch (M1P) | ||
+ | |SRAM bit cell | ||
+ | }} | ||
+ | {{scrolling table/mid}} | ||
+ | |- | ||
+ | ! [[Hitachi]] | ||
+ | |- style="text-align: center;" | ||
+ | | Hi-CMOS I | ||
+ | |- style="text-align: center;" | ||
+ | | ? | ||
+ | |- | ||
+ | ! Value | ||
+ | |- | ||
+ | | 3 µm | ||
+ | |- | ||
+ | | 3 µm | ||
+ | |- | ||
+ | | ? µm² | ||
+ | {{scrolling table/end}} | ||
== 3 μm Microprocessors == | == 3 μm Microprocessors == |
Revision as of 04:48, 4 April 2017
The 3 μm lithography process was the semiconductor process technology used by some semiconductor companies during the mid 1970s to the mid 1980s.
Industry
Fab |
---|
Process Name |
1st Production |
|
Contacted Gate Pitch |
Interconnect Pitch (M1P) |
SRAM bit cell |
Hitachi |
---|
Hi-CMOS I |
? |
Value |
3 µm |
3 µm |
? µm² |
3 μm Microprocessors
- Intel
- Novix NC4016
- Dec
- Siemens
- Fairchild
- Toshiba
- National
- ARM
This list is incomplete; you can help by expanding it.
3 μm Microcontrollers
3 μm Chips
References
- Meguro, S., et al. "Hi-CMOS III technology." Electron Devices Meeting, 1984 International. IEEE, 1984.