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Process Technology - Intel
This article details Intel's Semiconductor Process Technology.
Timeline
Year | Process Name | Node Name | Metal Layers | µarchs | Attributes | |||
---|---|---|---|---|---|---|---|---|
1982 | P646 | 1.5 µm | 2 | 80286, 80386 |
Lg | 1,500 nm | ||
Tox | ? nm | Gate Dielectric | Si2N2O | |||||
Vdd | ? V | |||||||
1987 | P648 | 1.0 µm | 2 | 80486 | Lg | 1,000 nm | ||
Tox | ? nm | Gate Dielectric | ||||||
Vdd | ? V | |||||||
1989 | P650 | 0.8 µm | 3 | 80486 | Lg | 800 nm | ||
Tox | ? nm | Gate Dielectric | ||||||
Vdd | ? V | |||||||
1993 | P852 | 0.5 µm | 4 | P5 | Lg | 500 nm | ||
Tox | 8.0 nm | Gate Dielectric | ||||||
Vdd | 3.3 V | |||||||
1995 | P854 | 0.35 µm | 4 | P6 | Lg | 350 nm | ||
Tox | 5.2 nm | Gate Dielectric | ||||||
Vdd | 2.5 V | |||||||
1997 | P856 P856.5 |
0.25 µm | 5 | P6 | Lg | 200 nm | ||
Tox | 3.1 nm | Gate Dielectric | SiO2 | |||||
Vdd | 1.8 V | |||||||
1999 | P858 | 0.18 µm | 6 | NetBurst | Lg | 130 nm | ||
Tox | 2.0 nm | Gate Dielectric | SiO2 | |||||
Vdd | 1.6 V | |||||||
2001 | P860 | 0.13 µm | 6 | Pentium M | Lg | 70 nm | ||
Tox | 1.4 nm | Gate Dielectric | SiO2 | |||||
Vdd | 1.4 V | |||||||
2003 | P1262 | 90 nm | 7 | Pentium M | Lg | 50 nm | ||
Tox | 1.2 nm | Gate Dielectric | SiO2 | |||||
Vdd | 1.2 V | |||||||
2005 | P1264 | 65 nm | 8 | Core, Modified Pentium M |
Lg | 35 nm | ||
Tox | ? nm | Gate Dielectric | SiO2 | |||||
Vdd | ? V | |||||||
2007 | P1266 | 45 nm | 9 | Penryn, Nehalem |
Lg | 25 nm | ||
Tox | ? nm | Gate Dielectric | High-κ | |||||
Vdd | ? V | |||||||
2009 | P1268 | 32 nm | 10 | Westmere, Sandy Bridge |
Lg | 30 nm | ||
Tox | ? nm | Gate Dielectric | High-κ | |||||
Vdd | ? V | |||||||
2011 | P1270 | 22 nm | 11 | Ivy Bridge, Haswell |
Lg | 26 nm | ||
Tox | ? nm | Gate Dielectric | High-κ | |||||
Vdd | ? V | |||||||
2014 | P1272 | 14 nm | 11 | Broadwell, Skylake, Kaby Lake, Coffee Lake |
Lg | 20 nm | ||
Tox | ? nm | Gate Dielectric | High-κ | |||||
Vdd | ? V | |||||||
2017 | P1274 | 10 nm | Cannonlake, Icelake, Tigerlake |
Lg | 18? nm | |||
Tox | ? nm | Gate Dielectric | High-κ | |||||
Vdd | ? V | |||||||
2019 | P1276 | 7 nm | ||||||
2022 | P1278 | 5 nm |