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'''Defect density''' ('''D<sub>0</sub>''') is the number of [[killer defects]] per unit area (typically cm²).
 
'''Defect density''' ('''D<sub>0</sub>''') is the number of [[killer defects]] per unit area (typically cm²).
  

Revision as of 11:23, 28 January 2019

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Yield
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Concepts

Defect density (D0) is the number of killer defects per unit area (typically cm²).

Overview

The defect density (D0) of a process is the number of defects that are large enough to become killer defects per unit area. Defects that are small enough to not cause operational issues are not taken into account in this value.

See also


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