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Defect Density (D0)

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Yield loss

Defect density (D0) is the number of killer defects per unit area (typically cm²).


The defect density (D0) of a process is the number of defects per die that are large enough to become killer defects per unit area. Defects that are small enough to not cause operational issues are not taken into account in this value.

Equation upper D 0 equals StartFraction n Over upper N upper A EndFraction

See also[edit]

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