This is the discussion page for the 10 nm lithography process page.

Please use this page to discuss possible errors, inconsistencies, omissions, changes, and further clarifications regarding the content of 10 nm lithography process. If you are looking for a particular model that's missing, please add its name to this page.

What is the source for interconnect and gate pitches?

What are the sources for the pitches of TSMC and Samsung. For Intel, what is the source of the interconnect pitch because Intel hasn't disclosed that one. Only gate pitch (http://www.eetimes.com/document.asp?doc_id=1330311).