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{{lithography processes}} | {{lithography processes}} | ||
− | The '''350 | + | The '''350 nm lithography process''' is a [[technology node|full node]] semiconductor manufacturing process following the [[500 nm lithography process|500 nm process]] node. Commercial [[integrated circuit]] manufacturing using 350 nm process began in late 1995. 350 nm was phased out and replaced by [[250 nm]] in 1999. |
== Industry == | == Industry == | ||
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|Process Name | |Process Name | ||
|1st Production | |1st Production | ||
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|Metal Layers | |Metal Layers | ||
| | | | ||
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|Contacted Gate Pitch | |Contacted Gate Pitch | ||
|Interconnect Pitch (M1P) | |Interconnect Pitch (M1P) | ||
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{{scrolling table/mid}} | {{scrolling table/mid}} | ||
|- | |- | ||
− | ! colspan="2" | [[Intel]] || colspan="2" | [[IBM | + | ! colspan="2" | [[Intel]] || colspan="2" | [[IBM]] || colspan="2" | [[AMD]] || colspan="2" | [[DEC]] || colspan="2" | [[Fujitsu]] || colspan="2" | [[IDT]] || colspan="2" | [[NEC]] || colspan="2" | [[TI]] || colspan="2" | [[Motorola]] || colspan="2" | [[Hitachi]] |
|- style="text-align: center;" | |- style="text-align: center;" | ||
− | | colspan="2" | P854 || colspan="2" | || colspan="2" | CS-34 | + | | colspan="2" | P854 || colspan="2" | || colspan="2" | CS-34 || colspan="2" | CMOS-6 || colspan="2" | CS-60 || colspan="2" | || colspan="2" | || colspan="2" | || colspan="2" | HiPerMOS 2 || colspan="2" | |
|- style="text-align: center;" | |- style="text-align: center;" | ||
− | | colspan="2" | 1994 || colspan="2" | 1994 || colspan="2" | 1995 | + | | colspan="2" | 1994 || colspan="2" | 1994 || colspan="2" | 1995 || colspan="2" | 1995 || colspan="2" | 1996 || colspan="2" | 1996 || colspan="2" | 1995 || colspan="2" | 1997 || colspan="2" | 1996 || colspan="2" | |
|- style="text-align: center;" | |- style="text-align: center;" | ||
− | + | | colspan="2" | 4 || colspan="2" | 5 || colspan="2" | 5 || colspan="2" | 6 || colspan="2" | 5 || colspan="2" | 3 || colspan="2" | 4 || colspan="2" | 5 || colspan="2" | || colspan="2" | | |
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− | | colspan="2" | 4 || colspan="2" | 5 || colspan="2" | 5 || colspan="2" | | ||
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− | + | ! Value !! [[500 nm]] Δ !! Value !! [[500 nm]] Δ !! Value !! [[500 nm]] Δ !! Value !! [[500 nm]] Δ !! Value !! [[500 nm]] Δ !! Value !! [[500 nm]] Δ !! Value !! [[500 nm]] Δ !! Value !! [[500 nm]] Δ !! Value !! [[500 nm]] Δ !! Value !! [[500 nm]] Δ | |
|- | |- | ||
− | | 550 | + | | 550 nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x |
|- | |- | ||
− | | 880 nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? | + | | 880 nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x || ? nm || ?x |
|- | |- | ||
− | | 18.1 | + | | 18.1 µm<sup>2</sup> || 0.41x || ? µm<sup>2</sup> || ?x || ? µm<sup>2</sup> || ?x || ? µm<sup>2</sup> || ?x || ? µm<sup>2</sup> || ?x || ? µm<sup>2</sup> || ?x || ? µm<sup>2</sup> || ?x || ? µm<sup>2</sup> || ?x || ? µm<sup>2</sup> || ?x || 21.67 µm<sup>2</sup> || ?x |
{{scrolling table/end}} | {{scrolling table/end}} | ||
− | === | + | === Design Rules === |
{| class="wikitable collapsible collapsed" | {| class="wikitable collapsible collapsed" | ||
|- | |- | ||
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| Metal 4 || 1.70 µm || 1.70 µm | | Metal 4 || 1.70 µm || 1.70 µm | ||
|} | |} | ||
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== 350 nm Microprocessors== | == 350 nm Microprocessors== | ||
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** {{intel|Mobile Pentium II}} | ** {{intel|Mobile Pentium II}} | ||
* AMD | * AMD | ||
+ | ** {{amd|Am486#Enhanced Am486|Enhanced Am486}} | ||
** {{amd|Am5x86}} | ** {{amd|Am5x86}} | ||
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** {{amd|K6}} | ** {{amd|K6}} | ||
* DEC | * DEC | ||
** {{decc|Alpha 21164A}} | ** {{decc|Alpha 21164A}} | ||
** {{decc|Alpha 21264}} | ** {{decc|Alpha 21264}} | ||
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* HAL | * HAL | ||
** {{hal|SPARC64 II}} | ** {{hal|SPARC64 II}} | ||
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* Parallax | * Parallax | ||
** {{parallax|Propeller 1}} | ** {{parallax|Propeller 1}} | ||
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{{expand list}} | {{expand list}} | ||
== 350 nm Microarchitectures == | == 350 nm Microarchitectures == | ||
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{{expand list}} | {{expand list}} | ||
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