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Rayleigh equation relates the critical dimension of a process to the numerical aperture and wavelength of the imaging system.
Etymology
The equation is named after John William Strutt, 3rd Baron Rayleigh (Lord Rayleigh) (November 12, 1842 - June 30, 1919), a well-known physicist and Nobel laureate whose original formulation formed the foundation for the modern variant as used by modern lithography.
Overview
Rayleigh equation relates the critical dimension of a process technology to the numerical aperture and wavelength of the imaging system. In other words, the smallest dimension printable on a chip is a function of the wavelength of the light and the numerical aperture (quality) of the lens.
Where:
- - critical dimension of the technology
- - wavelength of the imaging system
- - numerical aperture of the lens
- - k1 factor; dimensionless, process-dependent, constent
The equation shows that to make smaller features one can use either a smaller wavelength of light or better lenses.