IBM 32-nanometer DTCs used for eDRAM.

A deep trench capacitor (DTC) is a three-dimentional vertical capacitors formed by etching a deep trench (DT) into a silicon substrate.

Overview

Deep trench capacitors (DTCs) are vertical semiconductor devices that are used to add capacitance to various integrated circuits.

Memory

DTCs forms the main storage capacitor for one of main families of DRAM-based cells.

Logic

DTCs are unique in many ways from other capacitors. First, they are formed by etching deep trenches (DTs) into the substrate. This enables very high capacitance density, especially when they are coupled in parallel. Secondly, because they tend to be very thin and deep, when combined with the logic above, they may be used to form very dense structures such as embedded DRAM, PLL loop filters, decoupling circuitry, and other power applications.

See also

• stacked capacitor
• capacitor over bit (CoB)
• embedded DRAM
• deep trench