A scaling booster is an enhancement made to a process node beyond traditional scaling vectors in order to allow Moore's Law device scaling to continue or accelerate.

Overview

As process nodes continues to shrink, classical scaling vectors (e.g., gate pitch) becomes increasingly challenging. There are multiple reasons for this including electrostatics in the FEOL, RC delays in the BEOL, as well as general routing challenges. Scaling boosters have been introduced in order to aid traditional scaling vectors through various modifications and enhancements. Scaling boosters may be part of the process technology flow itself or as part of the standard library as part of the design-technology co-optimization (DTCO).

Boosters

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